2015
DOI: 10.1016/j.apsusc.2015.08.091
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Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse

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Cited by 15 publications
(2 citation statements)
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“…But very different nanostructure can be observed under low bias of −100 V, which is called amorphous carbon films dispersed with multilayer graphenes. It is very different from the films grown via PECVD that one can seen that with increasing the bias voltage, the hardness decreases while the elastic recovery keeps increasing [39]. The probable reason is that, at low pressure with the outfield auxiliary in reactive magnetron sputtering process, ions have higher free energy than that in PECVD which might induce easier graphitization.…”
Section: Structural Characterizationsmentioning
confidence: 78%
“…But very different nanostructure can be observed under low bias of −100 V, which is called amorphous carbon films dispersed with multilayer graphenes. It is very different from the films grown via PECVD that one can seen that with increasing the bias voltage, the hardness decreases while the elastic recovery keeps increasing [39]. The probable reason is that, at low pressure with the outfield auxiliary in reactive magnetron sputtering process, ions have higher free energy than that in PECVD which might induce easier graphitization.…”
Section: Structural Characterizationsmentioning
confidence: 78%
“…Hydrogenated amorphous carbon (a-C:H) films are well known to exhibit a low friction coefficient and high wear resistance, whereas their friction characteristics vary depending on the microstructure of the amorphous carbon network and the hydrogen content in the film. For example, the friction coefficient of a-C:H in ambient air varies in the range of 0.02–0.5 . The wide range of friction coefficient results from the wide variety of microstructures of a-C:H films, as well as the relative humidity (RH) in the friction environment, which makes finding and applying suitable a-C:H films in various industrial applications difficult. Therefore, classifying the a-C:H films is important to find the most suitable friction properties in various industrial applications. Though a-C:H films were generally classified by the C–C sp 3 ratio and hydrogen content, specifying the sp 3 ratio accurately is not easy.…”
Section: Introductionmentioning
confidence: 99%