Two-coordinate position sensitive amorphous silicon photodetectors

Toneva, A.; Sueva, D.

doi:10.1016/s0924-4247(98)00244-1

Cited by 13 publications

(7 citation statements)

References 11 publications

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“…characterize the vibration of spot is positioned only at the top or bottom part of the detector, where either A or B signal is totally absent. There the fluctuation of difference signal means the fluctuation of either top or bottom signal with half of the amplitude of Equation (2). The same fluctuating signal now appears as the sum signal.…”

Section: Shape Dependencementioning

confidence: 99%

“…The use of a reflected laser spot from the microcantilever to a PSD [1,2] to measure microcantilever motion has been one of the established techniques for the study of chemical [3][4][5][6][7][8][9], biological [10][11][12][13] and physical [14][15][16][17][18] processes for scanning force microscopy [19,20] as well as microcantilever sensors. In recent years, the necessity of the use of a multi-microcantilever readout system as a sensing device has been realized.…”

Section: Introductionmentioning

confidence: 99%

“…In recent years, the necessity of the use of a multi-microcantilever readout system as a sensing device has been realized. [21] A number of research teams has come up with possible solutions to develop a sensor device containing multiple microcantilevers working on the principle of optical beam deflection [3,22,23]. In usual scanning force microscopes the deflection of the cantilever beam is small and is limited within a few tens of nanometers depending on the roughness of the sample surface.…”

Section: Introductionmentioning

confidence: 99%

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Nonlinear Response of Multi-Segmented Photodetectors Used for Measurements of Microcantilever Motion over Large Dynamic Ranges

Kar¹,

George

2012

JST

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The use of multi-segmented Position Sensitive Photodiodes (PSD) to measure microcantilever deflections have been found to produce nonlinear signal output, especially when the dynamic range is large. The reflected beam of the microcantilever may undergo intensity and shape modifications prior to reaching the PSD. In a multi-microcantilever sensor system the variation in the size of the individual spots plays an additional role contributing to the nonlinearities of detector output. Irrespective of the range of operation the merits of intensity normalization have been discussed. We show that the output is proportional to the width of the spot along the split line of the detector. This enables the determination of the shape of a spot. We show that the microcantilever vibrational spectrum can be obtained just using a single segment photodetector instead of using multiple segmented PSDs. These concepts will greatly facilitate interpretation of sensor data acquired from either single or multi-microcantilever experimental platforms

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Section: Shape Dependencementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Nonlinear Response of Multi-Segmented Photodetectors Used for Measurements of Microcantilever Motion over Large Dynamic Ranges

Kar¹,

George

2012

JST

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“…The ratio of a pair of output currents from the electrodes depends on the position of light irradiated on the PSD, and by signal processing of the output currents the position can be detected in one or two dimensions. (14)(15)(16)(17)(18)(19) If PSDs are formed using polysilicon thin films, position sensors can be easily realized by a standard LSI process without any additional fabrication steps and connected with signal processing circuitry on the chip, even though their performances are not better than those of the conventional PSDs.…”

Section: Introductionmentioning

confidence: 99%

Study of Polysilicon Position-Sensitive Detector (PSD)

2008

Sensors and Materials

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A position-sensitive detector (PSD) fabricated using polysilicon films by a standard LSI fabrication process has been designed and its basic characteristics for sensor applications have been evaluated, together with the electrical characteristics of polysilicon photodiodes. A polysilicon PSD can be used as an optical position sensor on LSI chips without additional areas or process steps. Although the optoelectric conversion efficiency of a polysilicon PSD with a thickness of 335 nm irradiated with a near-IR light source was very low owing to small absorption coefficients and a short diffusion length of minority carriers in polysilicon films, a linear relationship between light position and output current was obtained. Using polysilicon films with a thickness of 1 μm, we improved the optoelectric conversion by about one order and obtained a hyperbolic-sine position dependence.

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“…Such kind of application, however, requires not only the intensity but also the position of the beam. The field of position sensitive devices (PSDs) has recorded many contributions on 1D and 2D detectors based principally on amorphous [2] and crystalline silicon [3]. Untill now, very few contributions have been focused on the realization of PSDs aiming to the control of the beam position and intensity, principally owing to nonuniformity in the quality of CVD diamond.…”

Section: Introductionmentioning

confidence: 99%