Two-dimensional optical accelerometer based on commercial DVD pick-up head

Chu, Chih‐Liang; Lin, Cha-Hao; Fan, Kuang‐Chao

doi:10.1088/0957-0233/18/1/033

Cited by 34 publications

(19 citation statements)

References 13 publications

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“…a translational motion δ Az in the z-axis direction and rotational motions θ x and θ y around the x-axis and y-axis, respectively. In the proposed probing system, the translational (δ Az ) and angular displacements (θ x and θ y ) of the touch trigger probe are measured using a one-dimensional displacement sensor [8] and a two-dimensional angle sensor [9] , respectively, both based on modified commercial DVD pickup heads.…”

Section: Sensor Designmentioning

confidence: 99%

Development of 3D touch trigger probe with real-time observation

Chu

2010

SPIE Proceedings

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This study aims at inventing a low-price but high-precision 3D touch trigger probe (or a CMM probe). The tip ball of the stylus, with a diameter smaller than 100 μm, is made by a micro electro discharge machine and wire electro discharge grinding. The stylus is mounted at the centre of a stiff cross-form frame, which in turn is suspended on four micro beams. As proven by several experiments, this structure restricts the degrees of freedom on three directions. The displacement sensor and 2D angle sensor is performed using modified commercial DVD pickup heads to measure the three degrees of motional freedom on the suspension structure. As for application, since the tip ball is difficult to identify by naked eye, we use modified commercial webcam and microscope to create a micro imaging system. This imaging system has been tested to have 2.8mmx2.1mm field of view, and 1.5mm depth of field.

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Section: Sensor Designmentioning

confidence: 99%

Development of 3D touch trigger probe with real-time observation

Chu

2010

SPIE Proceedings

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“…Low cost, high performance micromachined accelerometers have attracted research intention for application in daily lives such as air-bag systems in automobiles, measurement of mechanical shock, cell phones and navigation systems [1][2][3]. There are several sensing mechanisms for detecting acceleration such as piezoresistive, piezoelectric, optical and capacitive [4][5][6][7][8][9][10][11][12]. The micro machined accelerometers based on capacitive-type sensing mechanism have advantages that consist of high sensitivity, low noise, low temperature sensitivity, and low power consumption [13].…”

Section: Introductionmentioning

confidence: 99%

A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity

Nguyen

Chu

et al. 2019

JMES

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In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.

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“…Several accelerometers were developed based on the high precision displacement or angle sensor modified from DVD pick up head [ 25 , 26 , 27 ]. These optical accelerometers have high sensitivity and enable low amplitude vibration detection.…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Lei

Chang

et al. 2018

Sensors

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Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being actively suppressed. In this study, the design of a low-cost high-sensitivity optical accelerometer is proposed. This optical accelerometer mainly comprises three components: a seismic mass, a leaf spring, and a sensing component based on a four-quadrant photodetector (QPD). When a vibration is detected, the seismic mass moves up and down due to the effect of inertia, and the leaf spring exhibits a corresponding elastic deformation, which is amplified by using an optical lever and measured by the QPD. Then, the acceleration can be calculated. The resonant frequencies and elastic coefficients of various seismic structures are simulated to attain the optimal detection of low-frequency, low-amplitude vibration. The accelerometer is calibrated using a homemade vibration calibration system, and the calibration experimental results demonstrate that the sensitivity of the optical accelerometer is 1.74 V (m·s−2)−1, the measurement range of the accelerometer is 0.003–7.29 m·s−2, and the operating frequencies range of 0.4–12 Hz. The standard deviation from ten measurements is under 7.9 × 10−4 m·s−2. The efficacy of the optical accelerometer in measuring low-frequency, low-amplitude dynamic responses is verified.

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Two-dimensional optical accelerometer based on commercial DVD pick-up head

Cited by 34 publications

References 13 publications

Development of 3D touch trigger probe with real-time observation

Development of 3D touch trigger probe with real-time observation

A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

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