Two Dimensions Angular Sensor for Micro/Nano Measurement

The precision of two-dimensional angular sensing is crucial for applications such as navigation, robotics, and optical alignment. Conventional methods often struggle to balance precision, dynamic range, and affordability. We introduce a novel method leveraging the Talbot effect, enhanced by 3D printing technology, to fabricate a grating prototype for high-precision angular measurements. The method detects amplitude grating displacement at the self-imaging position and employs a frequency filtering algorithm for improved accuracy. Rigorous validation through simulations and physical experiments demonstrates that our method achieves a detection resolution of 0.4 arcseconds and a dynamic range exceeding 1400 arcseconds. This research presents a cost-effective, high-precision angular detection solution with potential for broad application in precision mechanical assembly, optical alignment, and other relevant domains.

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Two Dimensions Angular Sensor for Micro/Nano Measurement

Cited by 2 publications

References 10 publications

Laser-Based Sensing, Measurement, and Misalignment Control of Coupled Linear and Angular Motion for Ultrahigh Precision Movement

Laser-Based Sensing, Measurement, and Misalignment Control of Coupled Linear and Angular Motion for Ultrahigh Precision Movement

High-Precision Two-Dimensional Angular Sensor Based on Talbot Effect

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