Ultrafast laser ablation of metal films on flexible substrates

Gallais, Laurent; Bergeret, Emmanuel; Wang, Bin; Guérin, Mathieu; Bènevent, Evangéline

doi:10.1007/s00339-013-7901-2

Cited by 28 publications

(18 citation statements)

References 27 publications

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“…This means that the film can be opened without strong thermal effects like evaporation or melting. The visual appearance of the edges is similar to that observed for metallic Pt and Ag films deposited by RF sputtering, opened with a 1030 nm 500 fs laser pulse 15 . As seen from Fig.…”

Section: Results and Discussion A Single Spot Ablationsupporting

confidence: 69%

“…From these observations, the ablation mechanism of the film annealed at HT appears to be photoinduced laser spallation. The stresses and shockwaves generated in the film by laser irradiation lead to the disruption of the film/substrate interface 13,14 . This means that the film can be opened without strong thermal effects like evaporation or melting.…”

Section: Results and Discussion A Single Spot Ablationmentioning

confidence: 99%

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Influence of pre-annealing of printed silver electrodes on ultrafast laser ablation of short thin-film transistor channels on flexible substrates

Wiig

You

Brox-Nilsen

et al. 2018

Journal of Applied Physics

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The cutoff frequency and current from an organic thin-film transistor (OTFT) is strongly dependent on the length and to some extent the uniformity of the transistor channel. Reducing the channel length can improve the OTFT performance by increasing the current and frequency. Picosecond laser ablation of printed Ag electrodes, compatible with roll-to-roll fabrication has been investigated. The ablation threshold was found to be similar for the laser wavelengths tested: 515 nm and 1030 nm. Short transistor channels could be opened both after light annealing at 70 o C and after annealing at 140 o C. The channels in the lightly cured films had significantly less scale formation which critical for avoiding shunts in the device. By moving from bottom electrodes fully defined by printing to bottom electrodes where the transistor channel is opened by laser, the channel length could be reduced from 40 µm to less than 5 µm.

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Section: Results and Discussion A Single Spot Ablationsupporting

confidence: 69%

Section: Results and Discussion A Single Spot Ablationmentioning

confidence: 99%

Influence of pre-annealing of printed silver electrodes on ultrafast laser ablation of short thin-film transistor channels on flexible substrates

Wiig

You

Brox-Nilsen

et al. 2018

Journal of Applied Physics

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“…For example, an interesting method is the use of the shadowmasking technique since it is adapted to several kinds of materials and substrates [3], [4]. Another promising alternative which has gathered lot of interest is the direct laser writing technique since, not only it reduces production time, but is also suitable for the processing of a large range of materials [5], [6]. Nevertheless, for all these methods, the fabrication of complex microdevices which need the introduction of several layers and materials, requires additional steps like alignment and baking, and sometimes, the combination of several processing methods which increase the time and cost of fabrication.…”

Section: Introductionmentioning

confidence: 99%

One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing

Dubourg

Zlebic

Matovic

et al. 2015

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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In this work, we present for the first time a new fabrication process based on a 3D direct laser writing technique which allows the patterning of several layers in a single step by adjusting the power supplied by the laser in function with the optical properties of the materials. This approach was used for the fabrication of a piezoresistive MEMS (Micro Electro-Mechanical System) sensor made of flexible substrate whose three constituting layers were designed in the same step. The characterization of the resulting graphene strain gauge integrated in a Kapton microcantilever has shown a high sensibility since a gauge factor of 20 was obtained, proving the potential of the fabricated flexible piezoresistive MEMS to be used as transducer for the development of low-cost sensing platforms.

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“…Also due to the exceptional mechanical, chemical and thermal stability of Kapton films, traditional surface modification methods use harsh conditions to tune their inherent hydrophobicity by oxidizing and/or removing part of their surface polyimide. These traditional methods include laser ablation123, ion-beam etching45, plasma etching67, UV/ozone treatment68, acid69 and/or base10111213 treatments etc . The harsh conditions these methods use not only produce environmentally hazardous and health-threatening by-products or wastes (such as corrosive strong bases and acids, carcinogenic benzene, extremely irritating acrolein and other volatile hydrocarbons) which can be a serious environmental and safety problem when such surface modification is done in large scales and/or conducted indoors, but also compromise the structural integrity and the properties of the Kapton substrates.…”

mentioning

confidence: 99%

A bio-enabled maximally mild layer-by-layer Kapton surface modification approach for the fabrication of all-inkjet-printed flexible electronic devices

Fang

Hester

et al. 2016

Sci Rep

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A bio-enabled, environmentally-friendly, and maximally mild layer-by-layer approach has been developed to surface modify inherently hydrophobic Kapton HN substrates to allow for great printability of both water- and organic solvent-based inks thus facilitating the full-inkjet-printing of flexible electronic devices. Different from the traditional Kapton surface modification approaches which are structure-compromising and use harsh conditions to target, and oxidize and/or remove part of, the surface polyimide of Kapton, the present Kapton surface modification approach targeted the surface electric charges borne by its additive particles, and was not only the first to utilize environmentally-friendly clinical biomolecules to build up a thin film of protamine-heparin complex on Kapton, but also the first to be conducted under minimally destructive and maximally mild conditions. Besides, for electrically charged ink particles, the present surface modification method can enhance the uniformity of the inkjet-printed films by reducing the “coffee ring effect”. As a proof-of-concept demonstration, reduced graphene oxide-based gas sensors, which were flexible, ultra-lightweight, and miniature-sized, were fully-inkjet-printed on surface modified Kapton HN films and tested for their sensitivity to dimethyl methylphosphonate (a nerve agent simulant). Such fabricated sensors survived a Scotch-tape peel test and were found insensitive to repeated bending to a small 0.5 cm radius.

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Ultrafast laser ablation of metal films on flexible substrates

Cited by 28 publications

References 27 publications

Influence of pre-annealing of printed silver electrodes on ultrafast laser ablation of short thin-film transistor channels on flexible substrates

Influence of pre-annealing of printed silver electrodes on ultrafast laser ablation of short thin-film transistor channels on flexible substrates

One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing

A bio-enabled maximally mild layer-by-layer Kapton surface modification approach for the fabrication of all-inkjet-printed flexible electronic devices

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