2003
DOI: 10.1126/science.1081940
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Ultrahigh-Density Nanowire Lattices and Circuits

Abstract: We describe a general method for producing ultrahigh-density arrays of aligned metal and semiconductor nanowires and nanowire circuits. The technique is based on translating thin film growth thickness control into planar wire arrays. Nanowires were fabricated with diameters and pitches (center-to-center distances) as small as 8 nanometers and 16 nanometers, respectively. The nanowires have high aspect ratios (up to 10(6)), and the process can be carried out multiple times to produce simple circuits of crossed … Show more

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Cited by 841 publications
(643 citation statements)
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“…SNAP translates the atomic control over the film thicknesses within a thin film superlattice into control over the width and spacing of NWs. [23][24][25] SNAP is utilized to …”
mentioning
confidence: 99%
“…SNAP translates the atomic control over the film thicknesses within a thin film superlattice into control over the width and spacing of NWs. [23][24][25] SNAP is utilized to …”
mentioning
confidence: 99%
“…Si nanowires (SiNWs) have been produced by various techniques [1][2][3][4][5][6][7][8][9][10]. Broad applications of SiNWs for nanoelectronic or nanothermoelectronic devices or for physical-property testing systems have been proposed [11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…As one of the most important one-dimensional (1D) nanometer materials, the metal nanowires have been expected to play an important role in future electronic, optical and nanoelectromechanical devices [4][5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%