2000
DOI: 10.1063/1.371949
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Ultrahigh frequency permeability of sputtered Fe–Co–B thin films

Abstract: Amorphous FeCoB alloys can have high resistivity and relatively high saturation magnetization which are desired for ultrahigh frequency devices such as future write heads and wireless inductors. In this study, FeCoB films are observed to have a low easy axis coercivity (1–2 Oe), a field deposited induced anisotropy of ∼35 Oe and 4πMs∼17 500 G when sputtered in a typical configuration. However, samples sputtered in an off axis arrangement are found to have an additional uniaxial anisotropy as a result of the ob… Show more

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Cited by 107 publications
(54 citation statements)
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“…The M s increases with increasing annealing temperature and reaches the maximum value of 10.8 × 10 5 A/m. It is found that present M s values are comparable to those reported in literature [5,6,8]. The magnetic anisotropy takes place under field-annealing at 100 • C and corresponding h H c is 159 A/m, being one order reduced from the as-deposited value.…”
Section: Resultssupporting
confidence: 87%
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“…The M s increases with increasing annealing temperature and reaches the maximum value of 10.8 × 10 5 A/m. It is found that present M s values are comparable to those reported in literature [5,6,8]. The magnetic anisotropy takes place under field-annealing at 100 • C and corresponding h H c is 159 A/m, being one order reduced from the as-deposited value.…”
Section: Resultssupporting
confidence: 87%
“…The corresponding uniaxial anisotropy constant, Ku is thus estimated to be 912 J/m 3 [29,30] which is higher than those of permalloy or mumetal [31][32][33][34]. Such magnetic properties are in fact very promising as compared to those reported in literature [5][6][7][8]. (Figure 1) is thought to be responsible for this phenomenon.…”
Section: Resultsmentioning
confidence: 85%
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“…In fact, the high conductivity imposes a formidable challenge in applying metallic ferromagnetic thin films in integrated RF/microwave circuits, though many efforts have been made to develop high resistivity magnetic nano-granular films. [2][3][4][5][6][7] Low temperature spin sprayed ferrite films (Fe 3 O 4 ) with high self-biased ferromagnetic resonance (FMR) frequency and high electrical resistivity have been recently reported. 8 Such films can find immediate applications in patch antennas and bandpass filters.…”
Section: Introductionmentioning
confidence: 99%
“…Several different approaches have been investigated for achieving RF SMFs with high UMA, such as oblique sputtering, facing target sputtering, exchange coupling, magnetoelectric coupling, etc. Oblique sputtering, [8][9][10] and facing target sputtering 11 can generate magnetic films with high UMA field values of up to 200-300 Oe, however, these magnetic films suffer from a very non-uniform thick-ness particularly across a large wafer size, which severely limits their practical applications. Exchange coupling is another method to achieve enhanced UMA fields, such as anitiferromagnetic (AFM)/ ferromagnetic (FM) exchange coupling, 5 12 13 and FM coupling between magnetically soft and hard layers.…”
Section: Introductionmentioning
confidence: 99%