A nano vacuum tube which consists of a vacuum transistor
and a
nano vacuum chamber was demonstrated. For the device, a vacuum region
is an electron transport channel, and a vacuum is a tunneling barrier.
Tilted angle evaporation was studied for the formation of the nano
level vacuum chamber structure. This vacuum tube was ultraminiaturized
with several tens of 10–18 L scale volume and 10–6 Torr of pressure. The device structure made it possible
to achieve a high integration density and to sustain the vacuum state
in various real operations. In particular, the vacuum transistor performed
stably in extreme external environments because the tunneling mechanism
showed a wide range of working stability. The vacuum was sustained
well by the sealing layer and provided a defect-free tunneling junction.
In tests, the high vacuum level was maintained for more than 15 months
with high reliability. The Al sealing layer and tube structure can
effectively block exposed light such as visible light and UV, enabling
the stable operation of the tunneling transistor. In addition, it
is estimated that the structure blocks approximately 5 keV of X-ray.
The device showed stable operating characteristics in a wide temperature
range of 100–390 K. Therefore, the vacuum tube can be used
in a wide range of applications involving integrated circuits while
resolving the disadvantages of a large volume in old vacuum tubes.
Additionally, it can be an important solution for next-generation
devices in various fields such as aerospace, artificial intelligence,
and THz applications.