Ultraviolet emission from MgZnO films and ZnO/MgZnO single quantum wells grown by pulsed laser deposition

Effects of Thermal Annealing on the Properties of Zirconium-Doped MgxZn1−XO Films Obtained through Radio-Frequency Magnetron Sputtering

“…Extending the usable wavelength range and improving the efficiency of quantum confinement structures are crucial tasks in band-gap engineering of MZO films [6][7][8][9]. MZO films have been grown homoepitaxially through pulsed-laser deposition, molecular beam epitaxy, and radio-frequency (RF) magnetron sputtering [9][10][11][12][13]. However, few studies have reported the thermodynamic stability of un-doped MZO films deposited through RF magnetron sputtering [12,13].…”

The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators

“…21 By controlling the percentage of Mg-doped in the material, the Mg X Zn 1ÀX O lms with satisfactory sound velocity and electromechanical coupling coefficient can be tailored. 22 Mg X Zn 1ÀX O lms have been fabricated by a variety of techniques such as magnetron sputtering, 23,24 atomic layer deposition, 25,26 spray pyrolysis, 27,28 pulsed laser deposition (PLD), 29,30 and sol-gel coating. 31,32 Among these deposition techniques above, magnetron sputtering might be a most practical method because of its high deposition rate, good adhesion and good uniformity, which is suitable for commercialization.…”