Understanding imaging modes in the helium ion microscope

Scipioni, Larry; Sanford, Colin A.; Notte, John; Thompson, Bill; McVey, Shawn

doi:10.1116/1.3258634

Cited by 71 publications

(74 citation statements)

References 8 publications

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“…Lately, the He ion microscope (HIM) has become a most desirable addendum to the equipment portfolio due to its claimed focused spot size of 0.25 nm [182,183]. Topographic features as well as analytical information about the materials at the surface can be obtained [184,185]. Among the synchrotron radiation methods, grazing incidence small angle X-ray scattering (GISAXS) has been successfully applied to extended areas of regular nanostructure arrays [186] to reveal the morphology and arrangement of the patterned features and determine average values of pitch and structure sizes.…”

Section: Supporting Processesmentioning

confidence: 99%

3D THz metamaterials from micro/nanomanufacturing

Moser

Rockstuhl

2011

Laser & Photonics Reviews

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Metamaterials are engineered composite materials offering unprecedented control of wave propagation. Despite their complexity, effective properties can frequently be extracted by conceptualizing them as homogeneous and isotropic media with dispersive electric permittivity and magnetic permeability. For an ideal isotropic medium, strong dispersion in these properties causes wave and field vectors to form a left-handed (E,H,k)-frame involving backward waves, and offering control of quantities like the refractive index which may become negative. Experimental evidence exists from microwaves to the visible. Applications include sub-wavelength-resolution imaging, invisibility cloaking, plasmonics-based lasers, metananocircuits, and omnidirectional absorbers. As the engineered sub-structures must be smaller than their design wavelength, micro/nanomanufacturing is exploited from primary pattern generation over lithography to templating and molecular beam epitaxy. 3D metamaterials have been made by stacking of layers, multilayer structuring, and 3D primary pattern generation. Theory shows that full properties may build up over one or a very few layers.

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Section: Supporting Processesmentioning

confidence: 99%

3D THz metamaterials from micro/nanomanufacturing

Moser

Rockstuhl

2011

Laser & Photonics Reviews

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“…This technique is superior to SEM, especially for imaging non-conducting samples. 11 From those measurements, we derived a model of the nanorings obtained in the experiment that allows for an easy parameterization ( Figure 2(g)). The gold ring itself is parameterized with the unit cell size K, the outer diameter D 1 , the inner diameter D 2 , and the height h. Besides the rings, the most noticeable features in the cross-sectional views (Figures 2(e) and 2(f)) are a socket at the bottom and round edges at the topside of the rings.…”

Section: -2mentioning

confidence: 99%

Plasmonic nanoring fabrication tuned to pitch: Efficient, deterministic, and large scale realization of ultra-small gaps for next generation plasmonic devices

Lehr

Alaee

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et al. 2014

Applied Physics Letters

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A double-patterning process for scalable, efficient, and deterministic nanoring array fabrication is presented. It enables gaps and features below a size of 20nm. A writing time of 3min/cm2 makes this process extremely appealing for scientific and industrial applications. Numerical simulations are in agreement with experimentally measured optical spectra. Therefore, a platform and a design tool for upcoming next generation plasmonic devices like hybrid plasmonic quantum systems are delivered

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“…The Helium Ion Microscope (HIM) has become an ideal tool for imaging and nano-patterning [1]. Imaging with helium and neon ions leads respectively to resolutions of 0.5 nm and ~2 nm for SE based imaging, while structures with sub 20 nm feature sizes may be patterned using Ne.…”

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confidence: 99%

HIM-SIMS: Correlative SE/Chemical Imaging at the Limits of Resolution.

2017

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Techniques for nano-metrology and nano-analyisis are crucial for the ongoing investigation of nanoscale processes in disciplines from materials to life sciences. The Helium Ion Microscope (HIM) has become an ideal tool for imaging and nano-patterning [1]. Imaging with helium and neon ions leads respectively to resolutions of 0.5 nm and ~2 nm for SE based imaging, while structures with sub 20 nm feature sizes may be patterned using Ne. Despite these advantages, the analysis capability of the instrument is currently limited. At beam energies of 35 keV helium ions do not lead to the emission of characteristic X-rays from a sample. While some compositional information can be obtained from back scattered helium [2], identifying elemental information is more difficult due to the multiple collisions that occur at energies below 100 keV [3].In this paper we present the latest results from a prototype Secondary Ion Mass Spectrometry (SIMS) system specifically designed for the Zeiss ORION NanoFab HIM [4][5][6]. As the probe size of the HIM is below the lateral information limit in SIMS, the lateral resolution is only limited by the probe-sample interactions and not (as in commercial SIMS instruments) the probe size. Further, the in-situ combination of sub-nanometer resolution SE images with ultra-high resolution SIMS images, produces a step change in the information obtained from a single sample analysis: While secondary electron imaging on the HIM yields topographical information on the nanometre and even sub nanometer scale, SE imaging alone is not enough to obtain a deep understanding of the sample. SIMS imaging provides an elemental mapping capability, however as the yield of secondary ions is much lower than the one of electrons and the emission area is much larger, the resolution obtainable is limited to a few tens of nanometers. SIMS images often produce hot spots of a few pixels in size that are statistically significant due to the low background of SIMS (<< 1 cps) but yield little information about the size and morphology of the underlying structures that give rise to the signal. By combining both types of information, features too small to be adequately resolved in SIMS may be investigated by SE imaging and the two images sets co-registered and overlayed or fused [7,8]. By combining these two techniques in-situ, artefacts due to contamination or sample modification during transfer between instruments may be avoided. The speed at which it is possible to switch between SIMS and SE imaging in our system (the fastest switch can be made in as little as a few seconds) opens the possibility for entirely new correlative workflows to be developed. Figure 1 shows a correlative study of a lithium titanate and magnesium oxide nanoparticle mixture. Not only do the SIMS maps present the highest resolution SIMS data known to the authors (75-25% edge resolutions of just 10 nm have been obtained), the correlation of SIMS images with SE images allows individual nanoparticle clusters to be unambiguously identified. As SIMS is capa...

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Understanding imaging modes in the helium ion microscope

Cited by 71 publications

References 8 publications

3D THz metamaterials from micro/nanomanufacturing

3D THz metamaterials from micro/nanomanufacturing

Plasmonic nanoring fabrication tuned to pitch: Efficient, deterministic, and large scale realization of ultra-small gaps for next generation plasmonic devices

HIM-SIMS: Correlative SE/Chemical Imaging at the Limits of Resolution.

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