Uniformization of QCM’s Mass Sensitivity Distribution by Optimizing its Metal Electrode Configurations

Jiang, Haifeng; Tang, Longfei

doi:10.1109/jsen.2021.3056108

Cited by 10 publications

(16 citation statements)

References 32 publications

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“…The mass sensitivity distribution of the double-ring electrode QCM is more uniform than that of other electrode structures . Therefore, an elliptical double-ring electrode is proposed for the QCM.…”

Section: Resultsmentioning

confidence: 99%

Uniform Mass Sensitivity Distribution of Elliptically Designed Electrodes Based on a Quartz Crystal Microbalance

Jiang

Tang

2021

ACS Omega

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Uniformization of mass sensitivity distribution is conducive to the application of the quartz crystal microbalance (QCM) in some fields. However, the sensitivity of the QCM sensor surface perpendicular to the displacement direction is higher that of the displacement direction in the mass sensitivity distribution of ring and double-ring QCMs, which leads to poor reproducibility of the sensor. Considering the effect of the electrode structure on the mass sensitivity distribution, we found that for ring- and double-ring-type QCMs, when the elliptical single ring and double-ring electrode structures are combined, an approximately uniform mass sensitivity can be obtained in all directions. Therefore, this study proposes the elliptical single-ring and elliptical double-ring electrode structure design. Through theoretical calculations and three-dimensional finite element analysis verification, a systematic investigation is carried out to quantify the effect of the ratio of the minor axis to the major axis of the elliptical electrode on the mass sensitivity distribution in different directions, and the optimal ratio is found to be 0.8. Comparing the mass sensitivity of the new type of electrodes and the original electrodes, the result shows that the mass sensitivity distribution of the elliptical double-ring electrode structure is more uniform. Hence, these specially designed electrodes are conducive to improving the repeatability.

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Section: Resultsmentioning

confidence: 99%

Uniform Mass Sensitivity Distribution of Elliptically Designed Electrodes Based on a Quartz Crystal Microbalance

Jiang

Tang

2021

ACS Omega

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“…The electrode size plays an important role in mass sensitivity distribution. 14,15,17,21,22 Therefore, the width ratio of the dot electrode to the ring electrode may influence the mass sensitivity distribution.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…The solution of the above Bessel equation is as follows. C n ( n = 1, 2, 3, 4) are the equation coefficients, which can be determined through the boundary conditions (continuous and differentiable at the junction of each region). ,,, k r i = k i /√ N ( i = E, P, and U). J 0 and Y 0 are zero-order Bessel functions of the first kind and second kind, respectively.…”

Section: Theorymentioning

confidence: 99%

“…A detailed study on the ring electrode and double-ring electrode was done by Huang, 18−20 Qian, 21 and Jiang. 22 The results of the previous researchers and the change in the mass sensitivity distribution from the circular electrode to the ring and doublering electrodes indicate that adjusting the electrode structure can further improve the uniformity of the mass sensitivity distribution.…”

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confidence: 94%

“…Subsequently, the dot ring and double-ring electrode structures were proposed by Gao et al, and the corresponding mass sensitivity distributions have three peaks and four peaks. A detailed study on the ring electrode and double-ring electrode was done by Huang, − Qian, and Jiang . The results of the previous researchers and the change in the mass sensitivity distribution from the circular electrode to the ring and double-ring electrodes indicate that adjusting the electrode structure can further improve the uniformity of the mass sensitivity distribution.…”

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confidence: 99%

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Analysis of the Uniformization of the QCM Mass Sensitivity Distribution through a Dot Multiring Electrode Structure

2021

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In this paper, to improve the uniformity of the quartz crystal microbalance (QCM) mass sensitivity distribution, the effect of the size of dot ring electrode and dot double-ring electrode on the mass sensitivity distribution is analyzed theoretically from the perspective of the electrode width ratio, the width of the partially electroded region, and the electrode thickness. Within a certain range of electrode thickness, there is an optimum electrode width ratio to obtain a relatively uniform distribution. As long as the width of the partially electroded region is not too large or too small, it has no significant influence on the uniformity of the mass sensitivity of the optimum electrode size. The dot triple-ring electrode is proposed and the comparison of the uniformity between the three electrode structures indicates that more division of the electrode region can greatly improve the uniformity of the mass sensitivity distribution. This research provides a new direction for the uniformization of QCM mass sensitivity distribution.

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Exploration of the Mass Sensitivity of Quartz Crystal Microbalance under Overtone Modes Using Electrodeposition Method

Yesilbas

et al. 2022

Anal. Chem.

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With the in-depth application of quartz crystal microbalance (QCM) sensors in the fields of science and engineering, there is an urgent need for QCM sensors with high mass sensitivity. The mass sensitivity of a QCM is closely related to its resonance frequency, and the high resonance frequency leads to improve its mass sensitivity. However, the resonance frequency of a QCM resonator cannot be increased all the time due to the fragility of quartz wafer and the limits of energy trapping effect. Few studies are associated with mass sensitivity of a QCM resonator under overtone modes. Herein, we propose to make a QCM resonator work in its n-th overtone (n = 3, 5, 7, 9 in this study) mode to increase its resonance frequency during operating. Thereby, the purpose of improving QCM mass sensitivity is achieved, and the mass sensitivity of a QCM working in the n-th overtone mode can be called as n-th overtone mass sensitivity. Then, the n-th overtone mass sensitivity of a QCM sensor is measured by an electrodeposition method. The experimental results show that the n-th overtone mass sensitivity of a QCM is a bit more than n times that of the fundamental mass sensitivity, and it is consistent with the theoretical calculation results. The application of overtone mass sensitivity will greatly improve the sensitivity of QCM sensors, which is very attractive for the research fields that require QCM sensors with high sensitivity.

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Uniformization of QCM’s Mass Sensitivity Distribution by Optimizing its Metal Electrode Configurations

Cited by 10 publications

References 32 publications

Uniform Mass Sensitivity Distribution of Elliptically Designed Electrodes Based on a Quartz Crystal Microbalance

Uniform Mass Sensitivity Distribution of Elliptically Designed Electrodes Based on a Quartz Crystal Microbalance

Analysis of the Uniformization of the QCM Mass Sensitivity Distribution through a Dot Multiring Electrode Structure

Exploration of the Mass Sensitivity of Quartz Crystal Microbalance under Overtone Modes Using Electrodeposition Method

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