Universal correction procedure for electron-probe microanalysis. IV. The tilt factor

Sewell, D A; Love, G.; Scott, V. D.

doi:10.1088/0022-3727/20/12/003

Cited by 15 publications

(6 citation statements)

References 8 publications

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“…Because of an analytical model with crude simplifications, Niedrig's (1982) expression is not in good agreement with our model. Sewell (1987) published tilt angledependent Φ 0 measurements for aluminium and gold which are not quite reliable since the value of Φ 0 for normal incidence is wrong. In spite of some approximations, the angulardependent energy distributions measured by Kanter (1957) as well as the Monte Carlo simulations in Figures 3-5 agree well with our results.…”

Section: Resultsmentioning

confidence: 99%

“…Measurements with tilted specimen are reported by Sewell (1987). Since only few experimental investigations on the dependence of Φ 0 on the angle of incidence γ exist, the need for realistic models, which tend to the correct value for normal incidence to predict an accurate dependence on the incidenceangle, is evident.…”

Section: Introductionmentioning

confidence: 99%

“…9 Dependence of the surface ionization on the tilt angle for Al and Au. Solid line = Cazaux (1992), dotted line = Pouchou et al (1989), squares= Niedrig's model (1982), triangles = new expression, circles = measurements bySewell (1987).…”

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confidence: 99%

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Angular‐dependent energy distributions for backscattered electrons—Calculation of the surface ionization

et al. 1996

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Summary: An equation for angular-dependent energy distributions of backscattered electrons is presented. Extensive Monte Carlo simulations lead to a simple description for the energy distribution. A comparison of the new expression with experimentally derived curves, Monte Carlo results, and an analytical model is performed. The newly derived energy distributions are used for the calculation of the surface ionization Φ 0 for oblique angle of incidence. For normal incidence, a comparison with several published experimental data leads to a mean value for the deviation of < 4%. For tilted specimens the results are compared with findings of other authors.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Angular‐dependent energy distributions for backscattered electrons—Calculation of the surface ionization

et al. 1996

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“…Consequently, a detailed investigation is necessary to establish the exact form of the variation and, as in the construction of the basic absorption correction, this has been carried out using both tracer and Monte Carlo methods. 33 Tracer results obtained on aluminium at 10 kV ( Fig. 5) illustrate the effect of sample orientation on the @(pz) distribution.…”

Section: Specimens At Non-normal Incidencementioning

confidence: 92%

Formulation of a universal electron probe microanalysis correction method

Scott

Love

1992

X-Ray Spectrometry

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A new correction method for obtaining quantitative electron probe microanalysis results is described. It utilizes data provided by Monte Car10 simulations and tracer measurements to obtain a detailed picture of the way in which the x-ray emission process is influenced by the relevant experimental parameters. Then empirical equations are derived which model the intensity of x-ray emission for an extremely wide range of experimental conditions, encompassing electron beam energies from 5 to 40 keV, characteristic x-ray wavelengths from 11.4 to 0.08 nm, angles of electron incidence from 90" to 40" and elements ranging from beryllium to uranium in the Periodic Table. The method treats separately, as with the traditional approach, the effects of atomic number difference in specimen and standard, x-ray absorption and x-ray fluorescence. The correction method was tested on an extensive range of microanalysis data and shown to work well under all conditions, providing chemical compositions which are accutate to within a few percent relative. The capability of handling ultra-light element (beryllium to sodium) analysis is particularly impressive and the r.m.s. error of 3.8% for carbon analysis on carbides is very close to the errors incurred in measuring actual x-ray intensities. The correction program is currently being developed for commercial use on IBM-compatible computers and the final stage in the evolution of the universal correction will be to extend it to deal with the analysis of thin surface films.~~~ ~

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“…p/e being the mass absorption coefficient and $ the take-off angle of the detector. Often used first approximation (Bishop 1974) Similarly, ezp = @goo (0.291 + 0.708 sinp) (A7) (Sewell et al 1987), where $90. is a function of E and the target material only (e.g., Bishop 1974).…”

Section: Appendixmentioning

confidence: 99%