UV Embossing of Sub-micrometer Patterns on Biocompatible Polymeric Films Using a Focused Ion Beam Fabricated TiN Mold

Gao, Jian; Chan-Park, Mary B.; Xie, D. Z.; Yan, Yehai; Zhou, W. X.; Ngoi, B. K. A.; Yue, Chee Yoon

doi:10.1021/cm0342849

Cited by 19 publications

(12 citation statements)

References 12 publications

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“…It is instructive to consider how the results presented here impact polymer micro‐ and nanofabrication through a replication process, such as UV‐embossing 34–36. To facilitate release of the replica from the mold, the mold surface energy may be lowered or release agent may be added to the resin formulation.…”

Section: Discussionmentioning

confidence: 99%

Effect of molecular weight and substrate on silicone segregation from UV resin at plasma polymerized mold interface

Zhou

Yan

Pan

et al. 2010

J Polym Sci B Polym Phys

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Pristine‐, poly(octafluorotoluene)‐ (POFT), and polyacetylene (PAc)‐coated Si wafers were used as substrates for the study of segregation of silicone diacrylate (SA) from a formulation containing other oligomeric and monomeric acrylates. POFT and PAc were microwave plasma polymerized on the Si wafers. Three SAs with molecular weights ranging from 700 to 6000 Da were synthesized and characterized. Formulations with 2 wt % SA were ultraviolet cured on the silicon wafers. The surface composition of formulation‐substrate side of the cured film was analyzed with X‐ray photoelectron spectroscopy, and the depth profile was analyzed with time of flight‐secondary ion mass spectrometry. The analysis results indicated that SA aggregated on all three types of Si surfaces. However, SA segregation is highest on the low surface energy POFT‐coated Si substrate, and low‐molecular‐weight SA is favorable to the segregation. For high‐molecular‐weight SA, the different Si substrates do not affect the degree of aggregation at the formulation‐substrate interface. The observed SA aggregation trend can be predicted by the Gibbs‐adsorption equation correlated to the resin surface tension and contact angle on substrates. © 2010 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 48: 442–450, 2010

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Section: Discussionmentioning

confidence: 99%

Effect of molecular weight and substrate on silicone segregation from UV resin at plasma polymerized mold interface

Zhou

Yan

Pan

et al. 2010

J Polym Sci B Polym Phys

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“…Yue and co-workers [64] have investigated new materials (e.g., titanium nitride, TiN) for the nanopatterning of silicon via focused ion beam (FIB) lithography. These authors used TiN because it has desirable hydrophobic, chemical and metallurgical stability for multiple mold casting.…”

Section: Microfluidicsmentioning

confidence: 99%

Organic Nanoparticles: Adapting Emerging Techniques from the Electronics Industry for the Generation of Shape‐Specific, Functionalized Carriers for Applications in Nanomedicine

Euliss

Dupont

DeSimone

2007

Nanobiotechnology II

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The design and exploitation of materials and structures where at least one dimension is measured in the nanometer range broadly defines the term ''nanotechnology'' [1]. The umbrella of nanotechnology covers a wide variety of research disciplines, ranging from nanomachines to lithography to the development of nanoparticles (NPs). Nanomedicine is therefore the natural extension of nanotechnology implemented in the medical field. The National Institutes of Health (NIH) have recently coined the term ''Nanomedicine'' to mean the application of nanotechnology for the treatment, diagnosis, monitoring, and control of biological systems [2]. At the forefront of research in this area is the development of methods to target and deliver pharmaceutically-relevant cargo and diagnostic and imaging agents. One of the current trends in nanomedicine materials development is toward tunable monodisperse nanostructures, and considerable effort has been devoted to the design and fabrication of these materials. However, it is clear that the scientific community has only ''scratched the surface'' with respect to the ability to control and fabricate complex nanostructures with control over composition, shape, and function.The use of nanostructures as noninvasive imaging agents -referred to as ''nanodiagnostics'' -is one current area of research in nanomedicine. Here, ''smart-particles'' are prepared with the goal of detecting diseases at the earliest stages [3]. As these nanomaterials decrease in size, both their physical and chemical properties are subject to dramatic change, which often makes them amenable diagnostic agents. Examples include colloidal gold [4], iron oxide crystals [5], quantum dots (CdSe/ZnS) [6], and NPs that contain image-active cargos (Gdbased) [7]. For example, Huang and co-workers have described the use of gold nanorods of a specific aspect ratio that absorb and scatter strongly in the nearinfrared region. These nanorods are conjugated to anti-epidermal monoclonal antibodies and can be used simultaneously for molecular imaging and photother-285 Nanobiotechnology II. Edited by Chad A. Mirkin and Christof M. Niemeyer

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“…UV embossing (Shvartsman 1991;Bender et al 2000;Otto et al 2001;Gao et al 2004) is a replication technique that requires only low-temperature and low-pressure molding conditions, is compatible with high-throughput/short time cycle processing and provides good dimensional fidelity. In this process ( Fig.…”

Section: Introductionmentioning

confidence: 99%

Numerical analyses of peel demolding for UV embossing of high aspect ratio micro-patterning

et al. 2009

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Ultraviolet (UV) embossing, involving molding against micro-structured molds, is a quick and efficient method to mass produce high aspect ratio micro-features. A crucial challenge to the repeatability and large-scale application of this technique is successful demolding, which escalates in difficulty with increasing aspect ratio, due to increased polymer-mold mechanical interlocking. Some of the key factors affecting UV embossing include the crosslinked polymer shrinkage and material properties, interfacial strength between polymer to mold and the demolding method. This paper presents a new method to simulate the demolding of UV cured polymer from a nickel mold. Hyperelastic material model and rate-independent cohesive zone modeling were employed in the numerical simulation; linear elastic polymer response, although relatively easy to apply, was not adequate. Progressive shrinkage was implemented, leading to delamination of the polymer-mold interface. The subsequent peeling of the cured polymer from the mold was modeled with increasing prescribed displacement. The optimal shrinkage degree was found to increase from 0.92 to 1.9% with increasing mold aspect ratio (aspect ratio is defined as height to width ratio) from 5 to 10.

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UV Embossing of Sub-micrometer Patterns on Biocompatible Polymeric Films Using a Focused Ion Beam Fabricated TiN Mold

Cited by 19 publications

References 12 publications

Effect of molecular weight and substrate on silicone segregation from UV resin at plasma polymerized mold interface

Effect of molecular weight and substrate on silicone segregation from UV resin at plasma polymerized mold interface

Organic Nanoparticles: Adapting Emerging Techniques from the Electronics Industry for the Generation of Shape‐Specific, Functionalized Carriers for Applications in Nanomedicine

Numerical analyses of peel demolding for UV embossing of high aspect ratio micro-patterning

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