Vacuum packaged electromagnetic 2D scanning micromirror

Chung, Seung-Han; Lee, Seung-Ki; Ji, Chang-Hyeon; Park, Jae‐Hyoung

doi:10.1016/j.sna.2019.03.021

Cited by 14 publications

(2 citation statements)

References 21 publications

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“…Under these conditions, the displacement can be amplified and the voltage can be markedly reduced. (10)(11)(12)(13) However, in the case of devices that need to be driven with dc voltages, such as RF switches, 2D optical raster scanners, optical switches, and various sensors, displacement is not amplified even if operating in a vacuum environment. Moreover, it would be strongly desirable to control these devices directly using integrated circuits and MCU boards without any external driver boosters or power supplies.…”

Section: Introductionmentioning

confidence: 99%

A Novel MEMS Actuator Driven with a Low DC Voltage

Mizuno

2023

Sensors and Materials

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In this paper, we propose a novel MEMS actuator that can achieve a relatively large in-plane displacement of 5 μm or more driven with a low dc voltage of 3.3 to 5.0 V to ensure compatibility with integrated circuits and microcontroller unit (MCU) boards. The drive mechanism is based on a comb-shaped electrostatic microactuator. However, in general, the electrostatic type can achieve only a small amount of displacement in spite of a large driving voltage. On the other hand, by vacuum-sealing a device with such an actuator to reduce air resistance and performing ac driving at the resonant frequency of the device, the driving voltage can be considerably reduced. However, in the case of devices that need to be driven with dc voltages, such as RF switches, 2D optical raster scanners, optical switches, and various sensors, displacement is not amplified even if operating in a vacuum environment. Moreover, it would be strongly desirable to control these devices directly using integrated circuits and MCU boards without any external driver boosters or power supplies. In this paper, we demonstrate that a 6 μm in-plane displacement can be achieved with a dc driving voltage of less than 8.0 V by using a pull-in phenomenon and multiple spring-mass systems based on a comb-shaped electrostatic MEMS actuator.

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Section: Introductionmentioning

confidence: 99%

A Novel MEMS Actuator Driven with a Low DC Voltage

Mizuno

2023

Sensors and Materials

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“…Solid-state LiDARs using micro-electro-mechanical-system (MEMS) mirrors or vertical-cavity surface-emitting lasers have more advantages than rotating LiDARs in terms of embedding and the operation mechanisms of key components [ 3 , 4 ]. To use a MEMS mirror in a LiDAR, the performance of the single crystal silicon torsional bars in the chip unit, fatigue and durability of the spring, and vibration and shock absorption performance of the MEMS-mirror packaging unit must all be satisfactory [ 5 , 6 , 7 ]. Most commercially available MEMS mirrors have diameters from 1 mm to 3 mm and resonant frequencies varying from several kilohertz to 30 kHz.…”

Section: Introductionmentioning

confidence: 99%