Metrology, Inspection, and Process Control for Microlithography XXXIII 2019
DOI: 10.1117/12.2506890
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Verification and analysis of FEM for measurement of temperature distribution through the multilayer wall

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“…The heat losses problem appears in different technical branches from precise measurement systems to construction [1][2][3][4]. Insulating materials are widely used in various fields of knowledge [3][4][5][6]. There is a variety of insulating materials depending on the field of their application.…”
Section: Introductionmentioning
confidence: 99%
“…The heat losses problem appears in different technical branches from precise measurement systems to construction [1][2][3][4]. Insulating materials are widely used in various fields of knowledge [3][4][5][6]. There is a variety of insulating materials depending on the field of their application.…”
Section: Introductionmentioning
confidence: 99%