Vibration based electromagnetic micropower generator on silicon

Kulkarni, Santosh; Roy, Saibal; O’Donnell, Terence; Beeby, Steve; Tudor, John

doi:10.1063/1.2176089

Cited by 66 publications

(31 citation statements)

References 16 publications

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“…The field of Vibration-based Energy Harvesting (VEH) has been recognized as an area of intensive research for the past few years [1][2][3][4]. Most of the researches in the field of VEH involved linear resonating structures.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Nonlinear Spring Arm for Improved Performance of Vibrational Energy Harvesting Devices

Mallick

Amann

Roy

2013

J. Phys.: Conf. Ser.

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Abstract. Recently, a number of attempts have been made to increase the operational bandwidth of the energy harvesting devices. Nonlinear mechanisms are one of them. In this paper, we report design and analytical formulation of stretching strain of an electromagnetic energy harvester on FR4 material under large deformation of the spring arms. It is found that nonlinearity has an inverse square dependence on thickness of the arms. Numerical solution of a monostable Duffing oscillator that governs the dynamics of such a large deformed nonlinear energy harvester showed that with decrease of load resistance, the average power output increases, where the output response depends strongly on the input force. For small input acceleration, the desired large amplitude vibration does not come into play and the response becomes linear. However, for higher input acceleration nonlinearity appears and the operational bandwidth increases, at the same time, output power level also increases.

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Section: Introductionmentioning

confidence: 99%

Analysis of Nonlinear Spring Arm for Improved Performance of Vibrational Energy Harvesting Devices

Mallick

Amann

Roy

2013

J. Phys.: Conf. Ser.

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“…Both devices use a soft magnetic steel plate over the hard magnets to concentrate the flux lines. In our previous work [9], we have shown that the output power generated can be improved by using a soft magnetic layer to concentrate the flux lines in the region between the magnets. Prototype C comprises sintered NdFeB magnets and beryllium-copper beam with integrated coils fabricated through standard MEMS processing techniques.…”

Section: Fabrication and Assembly Processmentioning

confidence: 99%

“…In our previous works [8], we have reported the design, simulation and assembly process of a microgenerator using integrated coils on silicon with NdFeB bulk magnets. For further integration, cost reduction and batch fabrication of the electromagnetic generator [9], we have reported the simulation results for a generator using integrated coils and electroplated CoPt micro-magnets. In our recent work, we suggest a novel method of developing nanostructured, stress-free and thick Co-rich CoPtP films using a combination of pulse-reverse plating and addition of stress relieving additives [10].…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Kulkarni

Koukharenko

Tudor

et al. 2008

Sensors and Actuators A: Physical

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126

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This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially micro-fabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a deep reactive ion etched (DRIE) silicon beam and paddle. Prototype C uses moving NdFeB magnets in between two micro-fabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-electro-mechanical systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s 2 acceleration. For Prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s 2 , at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other micro-fabricated silicon-based generators reported in literature. This generator has a volume of 0.1 cm 3 which is lowest of all the silicon-based micro-fabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 586 nW across 110 load at 60 Hz for an acceleration of 8.829 m/s 2 .

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“…It generated 0.3μW of output power at the resonant frequency of 4MHz and the optimal load resistance of 39Ω [6][7]. Recently, several electromagnetic energy harvesters were reported using cantilever structures and mass-spring-damper systems [8][9][10][11][12][13][14][15][16][17]. These devices were comprised of single steel beam, coils, and magnets which were attached to the end of the beam.…”

Section: Introductionmentioning

confidence: 99%

Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications

Bang¹,

Park²

2013

Journal of Electrical Engineering and Technology

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-In this paper, two different electromagnetic energy harvesters using bulk micromachined silicon spiral springs and Polydimethylsiloxane (PDMS) packaging technique have been fabricated, characterized, and compared to generate electrical energy from ultra-low ambient vibrations under 0.3g. The proposed energy harvesters were comprised of a highly miniaturized Neodymium Iron Boron (NdFeB) magnet, silicon spiral spring, multi-turned copper coil, and PDMS housing in order to improve the electrical output powers and reduce their sizes/volumes. When an external vibration moves directly the magnet mounted as a seismic mass at the center of the spiral spring, the mechanical energy of the moving mass is transformed to electrical energy through the 183 turns of solenoid copper coils. The silicon spiral springs were applied to generate high electrical output power by maximizing the deflection of the movable mass at the low level vibrations. The fabricated energy harvesters using these two different spiral springs exhibited the resonant frequencies of 36Hz and 63Hz and the optimal load resistances of 99Ω and 55Ω, respectively. In particular, the energy harvester using the spiral spring with two links exhibited much better linearity characteristics than the one with four links. It generated 29.02μW of output power and 107.3mV of load voltage at the vibration acceleration of 0.3g. It also exhibited power density and normalized power density of 48.37μW·cm-3 and 537.41μW·cm-3·g-2, respectively. The total volume of the fabricated energy harvesters was 1cm x 1cm x 0.6cm (height).

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Vibration based electromagnetic micropower generator on silicon

Cited by 66 publications

References 16 publications

Analysis of Nonlinear Spring Arm for Improved Performance of Vibrational Energy Harvesting Devices

Analysis of Nonlinear Spring Arm for Improved Performance of Vibrational Energy Harvesting Devices

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications

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