Vibration characteristics of micromachined piezoelectric diaphragms with a standing beam subjected to airflow

Jing, Xiangmeng; Miao, Jianmin; Xu, Ting; Olfatnia, Mohammad; Norford, L.K.

doi:10.1016/j.sna.2010.09.017

Cited by 18 publications

(9 citation statements)

References 8 publications

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“…In the experimental part of this work, the Q value is measured by the relation f 0 / f , where f 0 is the frequency at which the real part of the impedance reaches its maximum, and f is the width of the peak at its half height. f 0 and f are estimated by fitting the measured phase peak using the Lorentz function [6]. For instance, the Q-factor of the PCMS shown in figure 5 was 73.125 at a quite low operating frequency of around 107.202 kHz.…”

Section: Device Characterizationmentioning

confidence: 99%

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Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors

Olfatnia

Shen

Miao

et al. 2011

J. Micromech. Microeng.

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Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors (PCMSs) are investigated theoretically and experimentally in this paper. The acoustic radiation and viscosity damping as the two main sources of energy dissipation in a medium virtually added the mass of the diaphragm and therefore decrease the frequency and Q-factor of the diaphragm. The magnitude of medium damping inversely depends on the radius-to-thickness ratio. An increase in this ratio is the trend in the fabrication of thin microdiaphragms by MEMS fabrication processes, which implies the higher influence of medium damping on the dynamic behavior of microdiaphragms. The fabricated PCMSs were tested in vacuum, air, and ethanol. The Q-factor and the resonant frequency of the device increase by almost seven times, 4.7% from air to 0.05 atmpressure, respectively. The Q-value drops from 111.195 in air to 23.908 in ethanol. Throughout this work, theoretical and experimental values were compared and a fairly good correlation was observed.

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Section: Device Characterizationmentioning

confidence: 99%

“…Micro-or nanoelectromechanical resonant sensors are devices whose resonant frequency shifts as a function of a physical or chemical parameter [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors

Olfatnia

Shen

Miao

et al. 2011

J. Micromech. Microeng.

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“…These are impaired by large power consumption, poor response, low sensitivity and large size. A variety of MEMS flow sensors employing various sensing mechanisms have been demonstrated in the past [1][2][3][4][5][6][7][8]. Tai et al [1] were among the first to develop a microscale sensor for flow sensing.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, in the recent years, considerable interest has been devoted to non-thermal flow sensors. Non-thermal flow sensors work on the principle of sensing pressure drop when the sensor experiences fluid flow over its surface [3][4][5][6]. The change in pressure is converted into the change in a measurable property of the sensor, which is calibrated to the fluid flow velocity.…”

Section: Introductionmentioning

confidence: 99%

A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications

Kottapalli¹,

Tan²,

Olfatnia³

et al. 2011

J. Micromech. Microeng.

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The paper reports the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor for flow rate and flow direction sensing applications. Elaborate experimental testing results demonstrating the sensors' performance as an airflow sensor have been illustrated and validated with theory. MEMS sensors using LCP as a membrane structural material show higher sensitivity and reliability over silicon counterparts. The developed device is highly robust for harsh environment applications such as atmospheric wind flow monitoring and underwater flow sensing. A simple, low-cost and repeatable fabrication scheme has been developed employing low temperatures. The main features of the sensor developed in this work are a LCP membrane with integrated thin film gold piezoresistors deposited on it. The sensor developed demonstrates a good sensitivity of 3.695 mV (ms−1)−1, large operating range (0.1 to >10 ms−1) and good accuracy in measuring airflow with an average error of only 3.6% full-scale in comparison with theory. Various feasible applications of the developed sensor have been demonstrated with experimental results. The sensor was tested for two other applications—in clinical diagnosis for breath rate, breath velocity monitoring, and in underwater applications for object detection by sensing near-field spatial flow pressure.

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“…Preliminary validation experiments showed that this artificial hair sensor based on PVDF has a reliable response with good sensitivity to external pressure variation and, medium flow. Other efforts are also being undertaken to fabricate piezoelectric-material-based hair flow sensors [26], [27], [28], [29], [30].…”

Section: A Artificial Snsmentioning

confidence: 99%

An Artificial Lateral Line Sensor Using Polyvinylidene Fluoride (PVDF) Membrane for Oscillatory Flow Sensing

Tan

Wang

2022

IEEE Access

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Flow sensing is an essential technology used in marine science. Fish live in fluid environments. Therefore, it is not surprising that fish have developed abilities to sense flow. We designed an artificial lateral line sensor for oscillatory flow sensing by mimicking the lateral line organ of a fish. This sensor is composed of an artificial cupula that mimics the cupula of neuromasts, cantilever beam that mimics hair-like cilia, and perception unit that mimics hair cells. We designed four different cupula shapes and discussed the influence of the artificial cupula shape on the sensing performance. We analyzed the structure of the cantilever beam to determine its length. The perception unit uses a polyvinylidene fluoride (PVDF) membrane as the piezoelectric sensing element. To protect the sensor from harsh fluid environments, a well-designed waterproofing scheme was proposed. Finally, a dipole stimulus was chosen for experimental validation. An experimental setup was constructed, and several experiments were conducted to prove the different abilities of the proposed sensor. The proposed sensor demonstrated a threshold sensing limit of 3.4 mm/s in oscillatory flow sensing.

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Vibration characteristics of micromachined piezoelectric diaphragms with a standing beam subjected to airflow

Cited by 18 publications

References 8 publications

Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors

Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors

A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications

An Artificial Lateral Line Sensor Using Polyvinylidene Fluoride (PVDF) Membrane for Oscillatory Flow Sensing

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