Vibration Energy Harvesting with PZT Micro Device

Muralt, Paul; Marzencki, M.; Belgacem, B.; Calame, F.; Basrour, Skandar

doi:10.1016/j.proche.2009.07.297

Cited by 148 publications

(54 citation statements)

References 12 publications

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“…The effect of a reduction of PZT thickness is explained by the fact that there is a trade-off between the increase of the oscillation amplitude, which is a consequence of lower stiffness, and the decrease of power generation, due to the lower amount of piezoelectric material. These results are qualitatively and quantitatively in agreement with literature results on cantilever harvesters with dimensions similar to the ones considered herein (Muralt et al, 2009). It is worth noting that these preliminary results already show that cantilever beams of standard MEMS dimensions are not suitable for being efficiently employed as resonant energy harvesters.…”

Section: Harmonic Excitationsupporting

confidence: 91%

Advanced Model for Fast Assessment of Piezoelectric Micro Energy Harvesters

et al. 2016

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The purpose of this work is to present recent advances in modeling and design of piezoelectric energy harvesters, in the framework of micro-electro-mechanical systems (MEMS). More specifically, the case of inertial energy harvesting is considered, in the sense that the kinetic energy due to environmental vibration is transformed into electrical energy by means of piezoelectric transduction. The execution of numerical analyses is greatly important in order to predict the actual behavior of MEMS devices and to carry out the optimization process. In the common practice, the results are obtained by means of burdensome 3D finite element analyses (FEA). The case of beams could be treated by applying 1D models, which can enormously reduce the computational burden with obvious benefits in the case of repeated analyses. Unfortunately, the presence of piezoelectric coupling may entail some serious issues in view of its intrinsically threedimensional behavior. In this paper, a refined, yet simple, model is proposed with the objective of retaining the Euler-Bernoulli beam model, with the inclusion of effects connected to the actual three-dimensional shape of the device. The proposed model is adopted to evaluate the performances of realistic harvesters, both in the case of harmonic excitation and for impulsive loads.

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Section: Harmonic Excitationsupporting

confidence: 91%

Advanced Model for Fast Assessment of Piezoelectric Micro Energy Harvesters

et al. 2016

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“…В статье [1] описан микромощный генератор, собирающий вибрационную энергию от резо нансных колебаний пьезоэлектрического мно гослойного кантилевера с инерционной массой (рис.1). Активная часть, состоящая из слоя цир конаттитаната свинца (ЦТС) толщиной 2 мкм и кремния толщиной 5 мкм, оснащена штыре выми электродами для достижения более высо к их напря жений.…”

Section: нанотехнологии мэмс однорезонансные генераторыunclassified

Some promising designs of piezoelectric energy generators

Chuprin¹,

Gavrilov²,

Generalov³

et al. 2016

NanoRus

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“…Several articles and significant research have been devoted to developing and understanding power-harvesting systems, with an emphasis on piezoelectric conversion to generate electricity from vibrations [4][5][6][7][8][9][10][11][12][13]. These studies demonstrated the feasibility of using piezoelectric materials as power sources.…”

Section: Introductionmentioning

confidence: 99%

“…Renaud et al [6] proposed a fabricated MEMSbased piezoelectric cantilever micro-generator with an integrated proof mass that can generate an average power of 40 µW at 1.8 kHz vibration frequency. Muralt et al [7] designed and fabricated a micro power generator of thin-film piezoelectric -laminated cantilever with proof mass and interdigitated electrodes that could generate a voltage of 1.6 V and power of 1.4 µW when excited to less than 20 m/s 2 vibration acceleration at 870 Hz resonant frequency. Sodano et al [8] developed a model to predict the amount of power capable of being generated through the vibration of a cantilever beam with attached piezoelectric materials.…”

Section: Introductionmentioning

confidence: 99%