Vibrational polaritons in thin oxide and nitride films

Abstract

Angular dependencies of infrared reflectivity spectra of thin silicon oxinitride amorphous films on silicon and porous aluminum oxide films on aluminum had been measured. These spectra show vibrational bands and strong interference bands allowing film thickness and dielectric function calculation and providing useful information on the bonding structure of the coatings. Angular dependencies of these bands give the dispersion of vibrational and interference polariton modes in the films. The intersection of vibrational and interference polaritons has been observed for silicon oxinitride film. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

The Role of Alanine in the Chemical Mechanical Polishing of Aluminum

“…K 2 EDTA reacted with the aluminum ions (Al 3+ ) to form soluble Al-EDTA complexes, thereby enhancing the removal rate of aluminum. Yakovlev et al 10 used alumina particles as abrasives and H 2 O 2 as an oxidant in the polishing slurry used with aluminum. They found that a higher aluminum removal rate resulted from smaller aluminum oxide thickness.…”