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Thermopile thermo-sensitive element for infrared (IR) sensor array and its optimization is considered. A concept of thermal infrared sensor array based on the micro (nano)-electromechanical system (MNEMS) with nonstationary Seebeck effect is discussed. Infrared absorption of non-stoichiometric silicon nitride thin films has been studied in the region of wavenumbers 500-7500 cm −1 . The estimated absorption about 64% is found for 1300 nm layer thickness, which is good enough for thermal sensor.

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Herein, the results of experiments on the synthesis of nonstoichiometric titanium oxide films by magnetron sputtering at various partial oxygen pressures and discharge powers are presented. The thermodynamic analysis of the synthesis results is performed by minimizing the Gibbs free energy of the equilibrium thermodynamic system, which takes place in the chamber. The dependences of the concentration of the main components in the deposition chamber on the partial pressure of oxygen and the discharge power, including the concentration of synthesized titanium monoxide and dioxide, are obtained. The analysis of these dependences allows determining the conditions for the critical values of the partial pressures of oxygen at which the oxides are synthesized. The exponential dependence of the conductivity on oxygen pressure is found experimentally and explained on the basis of hopping conductivity over the states of defects on the surface of nanocrystals that form the synthesized films.