Wide‐angle 2D beam‐steering with Si‐based 16 × (1 × 16) optical phased arrays

Yoon, Hyeonho; Lee, Dae‐Seong; Kim, Seong-Hwan; Kang, Geumbong; Shim, Joonsup; Rhee, Hyun‐Woo; Kwon, Nam-Hyun; Kim, Jeong‐Yoon; Park, Hyo‐Hoon

doi:10.1049/el.2019.3490

Cited by 4 publications

(2 citation statements)

References 11 publications

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“…The requirement for broadband operation of the photonic integrated circuit (PIC) as well as the laser-PIC coupling would also be removed. Singlewavelength, two dimensional beam-steering has been demonstrated using a switched multi-OPA approach [27,28], via the integration of a liquid-crystal filled cavities [29], by active tuning of the emitters [30] and using a single emitter on a thermally activated 2D MEMS cantilever [31]. Currently, none of these solutions offer 2D beam scanning with a satisfactory combination of high frequency operation, wide angular range and low power consumption for demanding sensor applications.…”

Section: Introductionmentioning

confidence: 99%

Active optical phased array integrated within a micro-cantilever

Fowler,

Guerber,

Mollard

et al. 2024

Preprint

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Using wafer level fabrication techniques, we combine silicon photonics and MEMS technologies to demonstrate the integration of an active photonic beam-steering circuit into a piezoelectric actuated micro cantilever. An optical phased array (OPA), operating at a wavelength of 905nm, provides output beam scanning over a range of 17° in one dimension, while the inclination of the entire circuit and consequently the angle of the output beam in a second dimension can be independently modified over a range of up to 40° via the piezoelectric actuator. This combination of existing commercial silicon technologies can provide continuous, low-divergence, solid-state beam scanning for sensing applications, while avoiding the disadvantages associated with the use of a widely tunable source laser.

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Section: Introductionmentioning

confidence: 99%

Active optical phased array integrated within a micro-cantilever

Fowler,

Guerber,

Mollard

et al. 2024

Preprint

View full text Add to dashboard Cite

show abstract

“…The requirement for broadband operation of the photonic integrated circuit as well as the laser-circuit coupling would also be removed. Single-wavelength, two dimensional beam-steering has been demonstrated using a switched multi-OPA approach 27 , 28 , via the integration of a liquid-crystal filled cavities 29 , by active tuning of the emitters 30 and using a single emitter on a thermally activated 2D MEMS cantilever 31 . Table 1 shows a comparison of a selection of demonstrations of solid-state 2D beam scanning devices using different physical mechanisms, highlighting the scanning range and beam divergence.…”

Section: Introductionmentioning

confidence: 99%

Active optical phased array integrated within a micro-cantilever

Guerber,

Fowler,

Mollard

et al. 2024

Commun Eng

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Three dimensional sensing is essential in order that machines may operate in and interact with complex dynamic environments. Solid-state beam scanning devices are seen as being key to achieving required system specifications in terms of sensing range, resolution, refresh rate and cost. Integrated optical phased arrays fabricated on silicon wafers are a potential solution, but demonstrated devices with system-level performance currently rely on expensive widely tunable source lasers. Here, we combine silicon nitride photonics and micro-electromechanical system technologies, demonstrating the integration of an active photonic beam-steering circuit into a piezoelectric actuated micro cantilever. An optical phased array, operating at a wavelength of 905 nm, provides output beam scanning over a range of 17° in one dimension, while the inclination of the entire circuit and consequently the angle of the output beam in a second dimension can be independently modified over a range of up to 40° using the piezoelectric actuator.

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Demonstration of Two-Dimensional Beam Steering through Wavelength Tuning with One-Dimensional Silicon Optical Phased Array

et al. 2022

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We demonstrate two-dimensional beam steering through wavelength control using a one-dimensional optical phased array (OPA) in which a path difference is built up in each channel to allocate a phase delay sequentially. Prior to the beam steering through wavelength tuning, phase initialization was performed to form a single beam using electro-optic p-i-n phase shifters to compensate for the phase error due to fabrication imperfections. With a 79.6 μm path difference in the phase-feeding lines and a 2 μm pitch in the grating radiators, we achieved a continuous transversal steering of about 46° through a wavelength tuning of about 7 nm. By extending the wavelength tuning range to 90 nm, longitudinal steering was attained near 13° with a discrete interval of about 1°. The beam was maintained during full two-dimensional steering and experienced only a small degree of degradation in the beam divergences and in the side lobe level. We analyzed the parameters to be able to induce the degradation of beam quality considering the fabrication errors of the geometric parameters of the OPA. The results indicated that the scanning scheme employing wavelength tuning after initialization with phase shifters can greatly reduce the realignment process of the beam pattern, even in the presence of some effective index perturbation during the fabrication.

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Wide‐angle 2D beam‐steering with Si‐based 16 × (1 × 16) optical phased arrays

Cited by 4 publications

References 11 publications

Active optical phased array integrated within a micro-cantilever

Active optical phased array integrated within a micro-cantilever

Active optical phased array integrated within a micro-cantilever

Demonstration of Two-Dimensional Beam Steering through Wavelength Tuning with One-Dimensional Silicon Optical Phased Array

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