Wideband Optical MEMS Interferometer Enabled by Multimode Interference Waveguides

Mortada, Bassem; Erfan, Mazen; Medhat, Mostafa; Sabry, Yasser M.; Saadany, Bassam; Khalil, Diaa

doi:10.1109/jlt.2016.2531642

Cited by 25 publications

(14 citation statements)

References 22 publications

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“…Another promising approach for on‐chip broadband spectrometers uses micro‐electro‐mechanical systems (MEMS) technology combined with Fourier transform infrared spectroscopy . These devices are usually fabricated via deep‐etching in silicon and are therefore not suitable for applications in the visible wavelength range.…”

Section: Introductionmentioning

confidence: 99%

“…These devices are usually fabricated via deep‐etching in silicon and are therefore not suitable for applications in the visible wavelength range. A different MEMS‐based architecture exploiting propagation of light in air as presented by Mortada et al allows extending the operation regime to visible wavelengths, yet with moderate resolution at 635 nm wavelength …”

Section: Introductionmentioning

confidence: 99%

“…The spectral resolution of those devices scales with the optical pathlength, resulting in relatively large footprints (≈1-2 cm 2 ).Another promising approach for onchip broadband spectrometers uses microelectro-mechanical systems (MEMS) technology combined with Fourier transform infrared spectroscopy. [8][9][10][11][12][13][14] These devices are usually fabricated via deepetching in silicon and are therefore not suitable for applications in the visible wavelength range. A different MEMS-based architecture exploiting propagation of light in air as presented by Mortada et al allows extending the operation regime to visible wavelengths, yet with moderate resolution at 635 nm wavelength.…”

mentioning

confidence: 99%

“…A different MEMS-based architecture exploiting propagation of light in air as presented by Mortada et al allows extending the operation regime to visible wavelengths, yet with moderate resolution at 635 nm wavelength. [9] As an alternative to wavelength-specific systems, spectrometers based on disordered scattering [15][16][17][18] have emerged to enable broadband optical operation. The working principle of such devices is based on the analysis of the speckle pattern which is formed by light after propagation through a disordered medium.…”

mentioning

confidence: 99%

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Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Hartmann

Varytis

Gehring

et al. 2020

Advanced Optical Materials

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Compact, on‐chip spectrometers exploiting tailored disorder for broadband light scattering enable high‐resolution signal analysis while maintaining a small device footprint. Due to multiple scattering events of light in the disordered medium, the effective path length of the device is significantly enhanced. Here, on‐chip spectrometers are realized for visible and near‐infrared wavelengths by combining an efficient broadband fiber‐to‐chip coupling approach with a scattering area in a broadband transparent silicon nitride waveguiding structure. Air holes etched into a structured silicon nitride slab terminated with multiple waveguides enable multipath light scattering in a diffusive regime. Spectral‐to‐spatial mapping is performed by determining the transmission matrix at the waveguide outputs, which is then used to reconstruct the probe signals. Direct comparison with theoretical analyses shows that such devices can be used for high‐resolution spectroscopy from the visible up to the telecom wavelength regime.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

mentioning

confidence: 99%

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Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Hartmann

Varytis

Gehring

et al. 2020

Advanced Optical Materials

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“…All the components of the MEMS chip are fabricated at the same time in a selfaligned manner, which is crucial for the device operation. The self-alignment is enabled by the photolithographic accuracy and subsequent etching [14]- [19]. The mirror metallization is achieved using step coverage of vertical surfaces [20].…”

Section: Theoretical Background and Device Descriptionmentioning

confidence: 99%

Toward On-Chip MEMS-Based Optical Autocorrelator

Othman

Kotb

Sabry³

et al. 2018

J. Lightwave Technol.

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We propose a compact MEMS-based optical autocorrelator based on a micromachined Michelson interferometer in silicon and the two-photon absorption nonlinearity in a photodetector. The miniaturized autocorrelator has a scanning range of 1.2 ps and operates in the wavelength range of 1100-2000 nm. The device measures the interferometric autocorrelation due to its collinear nature, from which the intensity autocorrelation can be calculated. The field autocorrelation can also be measured, from which the optical pulse spectrum can be calculated. A theoretical model based on Gaussian beam propagation is developed to study the effect of optical beam divergence, pulse dispersion, tilt angle between the interferometer mirrors, and amplitude mismatch between the interfering pulses. This model explains many of the effects observed in experimental measurements due to the use of a MEMS interferometer. The experimental results of autocorrelation signals for several pulses in the order of 100 fs are compared to a commercial autocorrelator and a good match is found. IndexTerms-Autocorrelator, dispersion, integrated, interferometric autocorrelation, micro-optical bench, ultrashort pulse measurement.

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Single MEMS Chip Enabling Dual Spectral‐Range Infrared Micro‐Spectrometer with Optimal Detectors

Salem

Sabry

Fathy

et al. 2021

Adv Materials Technologies

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Portable spectrometers enable rapid and low‐cost material analysis in a ubiquitous manner by measuring their molecular absorption spectrum. To measure a wide variety of materials, it is essential to have a broad spectral range of operation with acceptable sensitivity. Recently, the miniaturization of Fourier transform infrared spectrometers has been realized using the micro‐electro‐mechanical systems technology. In this work, two identical Michelson interferometers are monolithically integrated on a silicon chip, in a parallel architecture, and their mirrors are driven by a single comb‐drive actuator. The interferometers are fed by a broadband white light and their outputs are coupled to different photodetectors optimally selected for different spectral ranges. This enables an extended wavelength range of operation covering the near‐infrared from 1.4 to 2.6 µm and the mid‐infrared from 2.6 to 4.6 µm, simultaneously. Experimental results are obtained by using multimode optical fibers for light coupling between the components. The signal‐to‐noise ratio is measured and compared to theoretical expectations, showing good agreement. The spectral range of operation of the realized spectrometer is 1.4–4.6 µm (7142–2173 cm‐1) with a spectral resolution of 31.5 cm‐1. Finally, the spectrometer is used to acquire the transmission spectrum of polystyrene thin film and TS5 reference material.

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Wideband Optical MEMS Interferometer Enabled by Multimode Interference Waveguides

Cited by 25 publications

References 22 publications

Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Toward On-Chip MEMS-Based Optical Autocorrelator

Single MEMS Chip Enabling Dual Spectral‐Range Infrared Micro‐Spectrometer with Optimal Detectors

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