Single MEMS Chip Enabling Dual Spectral‐Range Infrared Micro‐Spectrometer with Optimal Detectors

Salem, A. M.; Sabry, Yasser M.; Fathy, Alaa; Khalil, Diaa

doi:10.1002/admt.202001013

Cited by 4 publications

(2 citation statements)

References 31 publications

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“…the spectra of different liquid samples. They also investigated the effect of the attenuated total reflection crystal refractive index on the absorption depth, paving the way for various applications in the fields of oil analysis, food safety, and healthcare [61] . In 2021, Salem et al demonstrated a dual-spectral range MEMS FTIR spectrometer comprising two identical Michelson interferometers working in parallel and monolithically integrated on a single Si chip (Fig.…”

Section: Micro-spectrometersmentioning

confidence: 99%

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Chen¹,

Zhang²,

Hong³

et al. 2022

J. Semicond.

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Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.

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Section: Micro-spectrometersmentioning

confidence: 99%

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Chen¹,

Zhang²,

Hong³

et al. 2022

J. Semicond.

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“…Micro-spectrometers with a small size, low energy consumption, and low cost have become promising alternatives in many spectral detection fields. Currently, micro-spectrometers are mainly made by micro-nano optical processing or micro-electro-mechanical system (MEMS) technology, including photonic crystal arrays [8][9][10], arrayed waveguide gratings [11], planar etched gratings [12], micro-Michelson interferometers [13], and narrowband optical filters [14,15]. The use of non-silicon-based photodetectors is another way to fabricate spectrometers, including graphene detectors [16], organic photodetectors [17], and colloidal quantum dot detectors (CQDs) [18].…”

Section: Introductionmentioning

confidence: 99%

Simulation and Design of HgSe Colloidal Quantum-Dot Microspectrometers

Wen

Zhao

et al. 2022

Coatings

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In recent years, colloidal quantum dots (CQD) have been intensively studied in various fields due to their excellent optical properties, such as size-tunable absorption features and wide spectral tunability. Therefore, CQDs are promising infrared materials to become alternatives for epitaxial semiconductors, such as HgCdTe, InSb, and type II superlattices. Here, we report a simulation study of a microspectrometer fabricated by integrating an intraband HgSe CQD detector with a distributed Bragg reflector (DBR). Intraband HgSe CQDs possess unique narrowband absorption and optical response, which makes them an ideal material platform to achieve high-resolution detection for infrared signatures, such as molecular vibration. A microspectrometer with a center wavelength of 4 µm is studied. The simulation results show that the optical absorption rate of the HgSe CQD detector can be increased by 300%, and the full-width-at-half-maximum (FWHM) is narrowed to 30%, realizing precise regulation of the absorption wavelength. The influence of the incident angle of light waves on the microspectrometer is also simulated, and the results show that the absorption rate of the HgSe quantum dot detector is increased 2–3 times within the incident angle of 0–23 degrees, reaching a spectral absorption rate of more than 80%. Therefore, we believe that HgSe CQDs are a promising material for realizing practical HgSe microspectrometers.

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Multianalyte Detection with Metasurface-Based Midinfrared Microspectrometer

Tan,

Meng,

Crozier

2024

ACS Sens.

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spectroscopy is an ideal tool for identifying chemicals in a nondestructive manner. The traditional platform is a Fourier transform infrared (FTIR) spectrometer, but this is too bulky, expensive, and power-hungry for many applications. There is therefore a growing demand for small, lightweight, and cost-effective microspectrometers for use in the field. One emerging platform is the filter-array detector-array microspectrometer. It pairs a broadband detector array with a thin and rigid array of spectral filters to offer a robust, compact platform for real-time in situ sensing. However, most demonstrations have only focused on identifying a single chemical against a null sample, even though many applications would involve multianalyte detection. In this work, we show a rare attempt at simultaneously tracking multiple analytes with a metasurface filter-array microspectrometer. The metasurface consists of periodic lattices of subwavelength circular apertures in an aluminum layer to create an array of bandpass filters. The filter array is imaged with an offthe-shelf microbolometer via a reverse-lens imaging setup to simultaneously monitor the concentration of ethanol and methanol in gasoline. This represents an important application of fuel quality monitoring. Chemometric models (PLS and SVR) are trained and tested on gasoline blends with ethanol and methanol contents, both ranging from 0% to 20% v/v. A support vector machine regression (SVR) model with a cubic kernel was found to have the lowest combined prediction errors. The root-mean-square-error of prediction (RMSEP) for ethanol and methanol are 1.23% and 1.84% v/v; the corresponding pseudounivariate limit of detection is found to be 4.22% and 6.86% v/v, respectively. This work takes the emerging field of metasurface-based mid-infrared spectrometers from single-to multianalyte detection, thereby considerably expanding their range of potential applications.

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Single MEMS Chip Enabling Dual Spectral‐Range Infrared Micro‐Spectrometer with Optimal Detectors

Cited by 4 publications

References 31 publications

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Simulation and Design of HgSe Colloidal Quantum-Dot Microspectrometers

Multianalyte Detection with Metasurface-Based Midinfrared Microspectrometer

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