2010 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) 2010
DOI: 10.1109/iccad.2010.5654260
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Work-function variation induced fluctuation in bias-temperature-instability characteristics of emerging metal-gate devices and implications for digital design

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Cited by 5 publications
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“…So the metal gate work function should be modeled as a probabilistic distribution rather than a deterministic value. [10] Table 1 [11] shows the physical properties of some metal nitrides of the metal gate. Where titanium nitride (TiN) and tantalum nitride (TaN) are used for n-channel MOS (NMOS) devices, tungsten nitride (WN), and molybdenum nitride (MoN) are used for p-channel MOS (PMOS) devices.…”
Section: Fluctuation Of the Metal-gate Work Functionmentioning
confidence: 99%
“…So the metal gate work function should be modeled as a probabilistic distribution rather than a deterministic value. [10] Table 1 [11] shows the physical properties of some metal nitrides of the metal gate. Where titanium nitride (TiN) and tantalum nitride (TaN) are used for n-channel MOS (NMOS) devices, tungsten nitride (WN), and molybdenum nitride (MoN) are used for p-channel MOS (PMOS) devices.…”
Section: Fluctuation Of the Metal-gate Work Functionmentioning
confidence: 99%