X-band RF MEMS phase shifters for phased array applications

Malczewski, A.; Eshelman, S.; Pillans, B.; Ehmke, J.; Goldsmith, C. Franklin

doi:10.1109/75.819417

Cited by 149 publications

(40 citation statements)

References 5 publications

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“…Malczewski et al [43] also reported a two-stage 2-bit reflection-type delay line, with tapped delay line reflection terminations. The same transmission line medium, substrate and MEMS switches were used as with the earlier switchedline example [39].…”

Section: Phase Shiftersmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

125

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A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced integrated subsystems. An overview of the associated fabrication technologies is given, in order to distinguish between the two distinct classes of RF microsystems' component technologies; non-MEMS micromachined and true MEMS. An extensive literature survey has been undertaken and key papers have been cited; from these, the motivations behind different RF MEMS technologies are highlighted. The importance of understanding the limitations for realising new and innovative ideas in RF MEMS is discussed. Finally, conclusions are drawn as to where future RF MEMS technology may lead. It is likely that the switch will continue to be the most important RF MEMS component, with future work investigating its enhanced functionality, subsystem integration and volume production. The focus of RF MEMS circuits will shift from the digital phase shifter to high-Q tuneable filters.

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Section: Phase Shiftersmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

125

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“…3b) [16]. The phase noise generated in each arm of the 3-dB coupler is the same as Case 2 above, but is referenced to half of the signal power.…”

Section: Phase Shifters Based On Shunt Switchesmentioning

confidence: 99%

Phase Noise Analysis of MEMS-Based Phase Shifters

Rebeiz

2001

2001 31st European Microwave Conference

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Abstract-The effect of Brownian noise on Micro-Electro-Mechanical (MEMS)-based circuits has been calculated for MEMS-based circuits (phase shifters, delay circuits). The calculations are done for capacitive shunt MEMS switches and metal-to-metal contact series MEMS switches. The phase noise due to Brownian motion is negligible for MEMS switches with k 10 N/m, g 0 > 2 µm, Q > 0.5, and f 0 50 kHz. It is also found that metal-to-metal contact series switches result in much less phase noise than standard capacitive shunt switches. The phase noise increases rapidly for low springconstant bridges (k =0.2-4 N/m), low-height bridges, and for bridges with a large mechanical damping (Q < 0.3). Also, varactor-based designs result in 30-40 dB more phase noise than switch-based circuits. The paper proves that microwave passive circuits built using MEMS switches (with a proper mechanical design) can be used in most commercial and military applications without any phase noise penalty.

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“…Besides the size advantage of this phase shifter, if their power and phasebandwidth capabilities are compared with phase shifters that use switched lines [14], reflection [15], or loaded * Correspondence: msengul@khas.edu.tr lines [16], it is acknowledged that high-pass/low-pass phase shifters are the best choice [12]. From the more complicated versions [17] to simple versions with pin diode switches [18], the usage of the high-pass/low-pass shifters has increased in the last 15 years.…”

Section: Introductionmentioning

confidence: 99%

High-pass/low-pass section design for 0$^{\circ}$--360$^{\circ}$ lumped-element phase shifters via the real frequency technique

Şengül¹

2017

Turk J Elec Eng & Comp Sci

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Abstract:In this paper, an algorithm based on the real frequency technique (RFT) is proposed to design high-pass and low-pass sections of a 0• -360• wide range lumped-element phase shifter. The switching process, however, is not considered in this work. In the algorithm, it is enough to define the section type (high-pass or low-pass) and the number of elements in the sections; there is no need to select the exact circuit topologies for the high-pass and low-pass sections.This is a natural consequence of the proposed approach. Unlike in the methods described in the literature, there is also no need to derive element value expressions. Two examples are given to illustrate the utilization of the proposed algorithm. The proposed algorithm and results are verified by simulation.

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X-band RF MEMS phase shifters for phased array applications

Cited by 149 publications

References 5 publications

Review of radio frequency microelectromechanical systems technology

Review of radio frequency microelectromechanical systems technology

Phase Noise Analysis of MEMS-Based Phase Shifters

High-pass/low-pass section design for 0$^{\circ}$--360$^{\circ}$ lumped-element phase shifters via the real frequency technique

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