The characterization and microanalysis of films with Auger and xray photoelectron spectroscopies J. Vac. Sci. Technol. A 4, 2900 (1986); 10.1116/1.573655 XRay Microscopy and XRay Microanalysis Phys. Today 15, 54 (1962); 10.1063/1.3058328 X-ray Microscopy and X-ray Microanalysis Am.Synchrotron radiation has recently contributed to the development of high-resolution x-ray microscopy either for biological investigations or for chemical microanalysis. Contact microscopy for this end appears to be particularly useful, but is mainly limited by the detectors that are used. In order to overcome these limitations-i.e., to obtain real time imaging and quantitative information-a study of a photoelectron x-ray microscope is made. Contact configuration is used, but the usual detector is replaced by a thin photocathode, The emitted secondary photoelectrons are then imaged by a suitable emission electron microscope. Problems of photoemission, resolution, and D.Q.E. limitation are discussed. The particular nature of electron lens aberrations, due to photoemission characteristics, is taken into account. The conclusions are that resolutions down to 500 A can be obtained in certain conditions. A preliminary low-magnification experiment is described and results are shown.