2013
DOI: 10.1063/1.4836235
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Zinc oxide integrated area efficient high output low power wavy channel thin film transistor

Abstract: High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO

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Cited by 13 publications
(12 citation statements)
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“…Although, it is less expensive compared to the first approach, the TFT properties suffer immensely from both gate leakage and gate-to source/drain overlap capacitance. The new approach -we are reporting improves Om per unit device width by increasing the device width vertically without chip area penalty, as well as, improves the field effect mobility, liFE, due to high electric field at fin corners, which enhances the field effect mobility, as reported in our previous work [5][6][7].…”
Section: Introductionmentioning
confidence: 67%
“…Although, it is less expensive compared to the first approach, the TFT properties suffer immensely from both gate leakage and gate-to source/drain overlap capacitance. The new approach -we are reporting improves Om per unit device width by increasing the device width vertically without chip area penalty, as well as, improves the field effect mobility, liFE, due to high electric field at fin corners, which enhances the field effect mobility, as reported in our previous work [5][6][7].…”
Section: Introductionmentioning
confidence: 67%
“…A thin dual gate approach on SOI with the volume inversion is reported in [5], [19]. The another representation using 2D planar UTB and 3D non-planar approach is first given by [20], [21] later provides the detailed analysis with several performance metrics analyzed and reported in [22]- [24]. The significance of the FinFET provides better layout area efficiency in the digital circuits [25].…”
Section: Device Description and Simulation Frameworkmentioning
confidence: 99%
“…1 These challenges can be mitigated by novel channel materials with better charge transport properties. 2 Prominent among the alternative channel materials being studied are graphene and other single atomic layer materials, 3-5 III-V semiconductors, 6-8 oxide semiconductors, 9 and carbon nanotubes. 10 Even in case of novel channel materials, a silicon wafer is still used as the starting substrate because of ease of processing and low cost.…”
Section: Introductionmentioning
confidence: 99%