We report on the fabrication, through photolithography techniques, and the detailed characterization, through direct transmission measurements, of a periodic system composed of five layers of photolithographically aligned micrometer-sized Ag split-ring resonators (SRRs). The measured transmission spectra for propagation perpendicular to the SRRs plane show a gap around 6 THz for one of the two possible polarizations of the incident electric field; this indicates the existence of a magnetic resonance, which is verified by detailed theoretical analysis. To our knowledge this is the first time that a system of more than one layer of micrometer-sized SRRs has been fabricated. The measured optical spectra of the Ag microstructure are in very good agreement with the corresponding theoretical calculations.
The nitridation of Al2O3 (0001) substrate surfaces by radio-frequency nitrogen plasma has been investigated. A 1.5-nm-thick surface nitride layer occurred for 100 min nitridation at high substrate temperature, while the nitridation appeared to be limited to a surface atomic plane at low temperature. In-plane lattice constant relaxation was observed in both cases. A high nitridation temperature resulted into a Ga face and a low temperature to N-face polarity of overgrown GaN films. However, low temperature nitridation and an AlN buffer layer also produced a Ga-face polarity. The results are consistent with low formation energy of AlN/sapphire films with Ga-face polarity.
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