We
present the experimental realization of ordered arrays of hyper-doped
silicon nanodisks, which exhibit a localized surface plasmon resonance.
The plasmon is widely tunable in a spectral window between 2 and 5
μm by adjusting the free carrier concentration between 1020 and 1021 cm–3. We show that
strong infrared light absorption can be achieved with all-silicon
plasmonic metasurfaces employing nanostructures with dimensions as
low as 100 nm in diameter and 23 nm in height. Our numerical simulations
show an excellent agreement with the experimental data and provide
physical insights on the impact of the nanostructure shape as well
as of near-field effects on the optical properties of the metasurface.
Our results open highly promising perspectives for integrated all-silicon-based
plasmonic devices for instance for chemical or biological sensing
or for thermal imaging.
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