Since shape memory alloys have been recognized to be a smart material, actuator elements based on the shape memory effect have been increasingly used in various ®elds of application. This paper reports on the design and fabrication of several silicon microactuators driven by shape memory elements, namely mechanical microgrippers, microvalves and arti®cial muscle actuators. The actuators were designed as compliant mechanisms and fabricated by silicon micromachining. For the processing of the shape memory elements a new laser assisted technology was applied. The shape memory elements were connected to the silicon mechanisms either by positive joining or by adhesive bonding.

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