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A hybrid CMOS/thin-film microsystem for fluorescence contact imaging is presented. The microsystem integrates a high-performance optical interference filter and a 128 128 pixel active pixel sensor fabricated in a standard 0.35-m CMOS technology. The thin-film filter has an optical density greater than 6.0 at the wavelength of interest, providing adequate excitation rejection to the 532-nm solid-state laser. Microsystem performance is experimentally validated by imaging spots of Cyanine-3 fluorophore, conventionally used in DNA detection. The emission intensity as a function of fluorophore concentration is measured with an estimated sensitivity of 5000 fluorophore m 2 . A human DNA microarray has been imaged with the sensor prototype.

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Abstract-In this paper a low-power switched-capacitor integrator based on a capacitive charge-pump (CP) is presented, and its practical effects are discussed. The CP integrator is employed as the first stage of a ADC. The 0.13 m CMOS prototype of the CP based ADC achieves the same performance as a conventional ADC while consuming 66% lower OTA power in the front-end integrator. The CP based modulator realizes 87.8 dB SNDR, 89.2 dB SNR and 90 dB DR over a 10 kHz bandwidth with 148 W power consumption. The conventional ADC has similar performance but dissipates 241 W. The energy required per conversion-step for the CP based ADC (0.369 pJ/step) is almost 40% lower than that of the conventional ADC (0.607 pJ/step).

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