Due to the threshold nature of the thermochemical oxidation process, it is possible to use a non-Gaussian intensity distribution within the writing spot, for increasing of spatial resolution of direct laser writing technology. The non-Gaussian distribution was obtained by distorting the Gaussian beam with an annular diaphragm. The width of the central peak (FWHM) is 40% smaller than the width of the Gaussian spot. It has been shown that by distorting the Gaussian spot, a smaller single line width can be obtained. The effect of side lobes during multipass writing on the width of the resulting single line was studied.