Silicon-compatible micromachining provides a low cost monolithic solution for the integration of microelectromechanical systems (MEMS). In the last years, C M P (the French MultiProject Wafer Service) has made available technological solutions f o r the fabrication of CMOS-compatible MEMS. Numerous monolithic devices have been fabricated using this service. The inspection of failed devices has allowed the identification of the most typical failure mechanisms and design errors f o r this type of MEMS. This valuable in-formation, together with a detailed analysis of the fabrication processes, is used in this paper to provide a classification of faults in silicon-compatible MEMS which can later be used for fault simulation and testing.

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