A detailed chemical kinetics scheme of the reactions occurring in a CH4∕H2 plasma, namely, electron-neutral, ion-neutral, and neutral-neutral reactions, is implemented for the prediction of the species fluxes toward the surface of a submicron particle in a low-pressure environment. Surface reactions at the particle surface are also accounted for. Kinetic theory is applied in the collisionless region within a distance of one mean free path away from the particle, while continuum theory is implemented to solve for species transport in the outer region where reactive-diffusive phenomena occur. These regions are bounded by appropriate boundary conditions. The self-consistent electric field is obtained by solving the Poisson’s equation in the continuum region. The charged and neutral species distributions are calculated and the growth rate of the amorphous carbon layer at the particle surface, as well as particle charging, are predicted. The predicted growth rate is within the range of experimental data from literature for similar conditions. This shows that the model reflects rather accurately the complicated physicochemical phenomena occurring in real systems.

In this paper, the effect of collisions on the charging and shielding of a single dust particle immersed in an infinite plasma is studied. A Monte-Carlo collision (MCC) algorithm is implemented in the particle-in-cell DEMOCRITUS code to account for the collisional phenomena which are typical of dusty plasmas in plasma processing, namely, electron-neutral elastic scattering, ion-neutral elastic scattering, and ion-neutral charge exchange. Both small and large dust particle radii, as compared to the characteristic Debye lengths, are considered. The trends of the steady-state dust particle potential at increasing collisionality are presented and discussed. The ions and electron energy distributions at various locations and at increasing collisionality in the case of large particle radius are shown and compared to their local Maxwellians. The ion-neutral charge-exchange collision is found to be by far the most important collisional phenomenon. For small particle radius, collisional effects are found to be important also at low level of collisionality, as more ions are collected by the dust particle due to the destruction of trapped ion orbits. For large particle radius, the major collisional effect is observed to take place in proximity of the presheath. Finally, the species energy distribution functions are found to approach their local Maxwellians at increasing collisionality.

No abstract

No abstract

No abstract