Due to the shadowing effect, the oblique angle deposition technique can produce nanorods tilted toward the incident deposition flux. Periodic posts serving as seeds on a substrate allow the fabrication of nanorod arrays with controllable separations. However, in a conventional oblique angle deposition with no substrate rotation, nanorods grow faster along their widths in the direction perpendicular to the plane of incident flux. This anisotropic growth can result in 'fan-out' shapes of nanorods that touch each other due to the faster growing widths. Asymmetric two-phase substrate rotation was designed to eliminate the side growth in oblique angle deposition. In this method, the growing rods are exposed to the deposition flux from all angles with some portion of a rod surface receiving more flux than the rest. We fabricated well-aligned Si nanorod arrays with uniform sizes from templates arranged in square and triangular lattices using this two-phase substrate rotation method.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.