We have developed an atomic monitoring system for physical vapor deposition process control based on a frequency-modulation (FM) spectroscopy scheme using a 670 nm external cavity diode laser. FM detection made it possible to measure absorption as low as 10−6. For electron-beam evaporated yttrium, deposition rate control with a relative accuracy better than 1% at a rate of 3.5 Å/s has been realized, corresponding to a deposition rate resolution of 0.03 Å/s. Variations in Doppler shifts due to the velocity distribution of the atomic vapor within the deposition chamber have been measured, demonstrating the possibility of velocity mapping of evaporated atoms in the deposition process.

No abstract

No abstract

Abstract. This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to 300 o C without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.