A direct correlation has been established between stacking faults in a-plane GaN epilayers and luminescence peaks in the 3.29–3.41 eV range. The structural features of the stacking faults were determined by diffraction-contrast transmission electron microscopy, while the optical emission characteristics were observed by highly spatially resolved monochromatic cathodoluminescence. The studies were performed in the exact same regions of thinned foils. We find that stacking faults on the basal plane are responsible for the strong emission at ∼3.14eV. Luminescence peaks at ∼3.33 and ∼3.29eV are associated with the presence of stacking faults on prismatic a planes and partial dislocations at the stacking fault boundaries, respectively.
We report on the performance of AlGaN/GaN/AlN heterostructure field-effect transistors (HFETs) grown over slightly-off c-axis, single-crystal, bulk AlN substrates. Dc and rf characteristics of these devices were comparable to HFETs grown on semi-insulating SiC. The obtained results demonstrate that bulk AlN substrates are suitable for fabricating high-power microwave AlGaN/GaN transistors.
We report homoepitaxial GaN growth on freestanding (11̄00) oriented (M-plane GaN) substrates using low-pressure metalorganic chemical vapor deposition. Scanning electron microscopy, atomic-force microscopy, and photoluminescence were used to study the influence of growth conditions such as the V/III molar ratio and temperature on the surface morphology and optical properties of the epilayers. Optimized growth conditions led to high quality (11̄00) oriented GaN epilayers with a smooth surface morphology and strong band-edge emission. These layers also exhibited strong room temperature stimulated emission under high intensity pulsed optical pumping. Since for III-N materials the (11̄00) crystal orientation is free from piezoelectric or spontaneous polarization electric fields, our work forms the basis for developing high performance III-N optoelectronic devices.
In this paper, we report the pulsed atomic-layer epitaxy (PALE) of ultrahighquality AlN epilayers over basal-plane sapphire substrates and their use as templates to grow high-quality AlGaN layers with Al content ranging from 0.3 to 1. Symmetric/asymmetric x-ray diffraction (XRD) and room-temperature (RT) photoluminescence (PL) measurements were used to establish the highstructural and optical quality. The XRD (002) and (114) rocking-curve fullwidth at half-maximum (FWHM) values of the PALE-grown AlN epilayers were less than 60 arcsec and 250 arcsec, respectively. Using these ultrahighquality layers as templates, Si-doped AlGaN layers with a large Al content from 30% to 100% were grown and used for milliwatt power sub-280-nm, deepultraviolet (UV) light-emitting diodes (LEDs).
We report on the strain reduction in AlGaN layers grown on porous GaN (P-GaN) by metalorganic chemical vapor deposition (MOCVD). The P-GaN was obtained by ultraviolet radiation-enhanced electroless wet chemical etching of thick hydride vapor phase epitaxial grown GaN (HVPE-GaN) templates over (001) sapphire substrates. By optimizing the growth conditions, lateral growth of AlGaN was enhanced resulting in air-bridge formation between the P-GaN and the AlGaN layers. X-ray diffraction studies showed significant strain relaxation in AlGaN layers primarily due to the strain sharing between P-GaN and the AlGaN layers. This allowed us to grow crack-free good optical quality layers with thickness exceeding the critical limits for AlGaN deposition on the conventional MOCVD GaN or HVPE-GaN. The obtained results demonstrate the potential of this approach for the development of efficient ultraviolet light emitters.
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