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We introduce the first monolithic step-up dc-dc converter operating at deep sub-1 V (i.e., 0.18-0.4 V) that outputs significant power for Internet-of-Things with a peak power efficiency of 81.2% at 50 µW output power for the 0.18-V input and 87.1% at 300 µW output power for 0.4 V. It is implemented in 16-nm FinFET CMOS and uses an MOS transistor as a high-density flying capacitor for energy conversion. The capacitor is arranged in a self-biased deep N-well topology, which enhances the overall efficiency by 9.5%. An integrated time-to-digital converter verifies the dc-dc output quality.