In this work, we report our recently developed 27 kV, 20 A 4H-SiC n-IGBTs. Blocking voltages exceeding 24 kV were achieved by utilizing thick (210 μm and 230 μm), lightly doped N-drift layers with an appropriate edge termination. Prior to the device fabrication, an ambipolar carrier lifetime of greater than 10 μs was measured on both drift regions by the microwave photoconductivity decay (μPCD) technique. The SiC n-IGBTs exhibit an on-state voltage of 11.8 V at a forward current of 20 A and a gate bias of 20 V at 25 °C. The devices have a chip size of 0.81 cm2and an active conducting area of 0.28 cm2. Double-pulse switching measurements carried out at up to 16 kV and 20 A demonstrate the robust operation of the device under hard-switched conditions; coupled thermal analysis indicates that the devices can operate at a forward current of up to 10 A in a hard-switched environment at a frequency of more than 3 kHz and a bus voltage of 14 kV.
Advanced high-voltage (10 kV -15 kV) silicon carbide (SiC) power MOSFETs described in this paper have the potential to significantly impact the system performance, size, weight, high-temperature reliability, and cost of nextgeneration energy conversion and transmission systems. In this paper, we report our recently developed 10 kV/20 A SiC MOSFETs with a chip size of 8.1 × 8.1 mm 2 and a specific onresistance (R ON,SP ) of 100 mΩ⋅cm 2 at 25 °C. We also developed 15 kV/10 A SiC power MOSFETs with a chip size of 8 × 8 mm 2 and a R ON,SP of 204 mΩ⋅cm 2 at 25 °C. To our knowledge, this 15 kV SiC MOSFET is the highest voltage rated unipolar power switch. Compared to the commercial 6.5 kV Silicon (Si) IGBTs, these 10 kV and 15 kV SiC MOSFETs exhibit extremely low switching losses even when they are switched at 2-3x higher voltage. The benefits of using these 10 kV and 15 kV SiC MOSFETs include simplifying from multilevel to twolevel topology and removing the need for time-interleaving by improving the switching frequency from a few hundred Hz for Si based systems to ≥ 10 kHz for hard-switched SiC based systems.
A detailed analysis of silicon-carbide (SiC) metal–oxide–semiconductor field-effect-transistor (MOSFET) physics is performed. Measurements of current–voltage characteristics are taken. A device simulator is developed based on the drift–diffusion equations. The model accounts for incomplete ionization. Comprehensive mobility and interface state models are developed for SiC MOSFETs. The mobility model accounts explicitly for bulk transport, as well as for interface states, surface phonons and surface roughness. Agreement between simulated and measured terminal characteristics is obtained. The results provide values for interface state occupation as a function of energy and position along the surface. Results giving values for surface mobility as a function of position along the channel indicate that interface states have an especially strong effect on SiC operation. Our investigation indicates that substantial reduction of interface states can give rise to a fivefold increase in transconductance.
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