The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib waveguide with a large core cross section (4 μm in height and 20 μm in width) in broadband single mode operation (λ = 0.4 μm to 0.65 μm). We have successfully demonstrated a 2D scanning motion using non- resonating operation with 201Hz in vertical direction and 20 Hz in horizontal direction. This non-resonating scanner system has achieved a field of view (FOV) of 0.019 to 0.072 radians in vertical and horizontal directions, with the advantage of overcoming its frequency shift caused by fabrication uncertainties. In addition, we observed two fundamental resonances at 201 and 536 Hz in the vertical and horizontal directions with corresponding displacements of 130 and 19 μm, or 0.072 and 0.0105 radian field of view operating at a +150 V input. A gradient index (GRIN) lens is placed at the end of the waveguide to focus the diverging beam output from the waveguide and a 20 μm beam diameter is observed at the focal plane. The transmission efficiency of the waveguide is slightly low (~10%) and slight tensile residual stress can be observed at the cantilever portion of the waveguide due to inherent imperfections in the fabrication process.

We investigate three cases of metamaterials presented in the literature displaying refractive index with one or more discontinuities along the frequency spectrum. We reproduce the numerical simulations of these metamaterials and compare our simulations to each reported case. For each case, we perform a geometrical investigation of each metamaterial’s refractive index by mean of a numerical simulation of a prism made of the reported metamaterials upon which is incident a plane electromagnetic wave. Such investigation allows us to infirm or confirm negative refraction at resonance frequency. Finally, we carry a numerical and theoretical investigation of this discontinuity and show that, as the refractive index crosses a discontinuity, while the topology of the effective wave has changed within the metamaterial, the dynamics of the phases remain unchanged at any time at the metamaterial's boundaries.

No abstract

No abstract