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This work reports the processing and properties of a new chalcogenide glass film that can be photo-patterned by multiphoton lithography (MPL) with enhanced post-fabrication stability. Thermally evaporated germanium-doped arsenic selenide [Ge 5 (As 2 Se 3) 95 ] thin films were photo-patterned using the output of a mode-locked titanium:sapphire laser. The morphology, chemical structure, and optical properties of the material were studied before and after photo-patterning and compared for their long-term aging behavior and stability to previously investigated arsenic trisulfide (As 2 S 3) films fabricated using similar MPL conditions. Relative to As 2 S 3 , thermally deposited Ge 5 (As 2 Se 3) 95 is found to offer higher photosensitivity and greater chemical stability after photo-patterning, as evidenced by lack of ageinduced crystallization and reduced feature degradation over a four year aging period. These findings demonstrate the suitability of a new photo-patternable material for the creation of robust, long-lived functional infrared anti-reflective coatings and meta-optics.

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Novel optical materials capable of advanced functionality in the infrared will enable optical designs that can offer lightweight or small footprint solutions in both planar and bulk optical systems. UCF's Glass Processing and Characterization Laboratory (GPCL) with our collaborators have been evaluating compositional design and processing protocols for both bulk and film strategies employing multi-component chalcogenide glasses (ChGs). These materials can be processed with broad compositional flexibility that allows tailoring of their transmission window, physical and optical properties, which allows them to be engineered for compatibility with other homogeneous amorphous or crystalline optical components. This paper reviews progress in forming ChG-based GRIN materials from diverse processing methodologies, including solution-derived ChG layers, poled ChGs with gradient compositional and surface reactivity behavior, nanocomposite bulk ChGs and glass ceramics, and meta-lens structures realized through multiphoton lithography (MPL).