A model to explain the observed low transverse mobility in GaN by scattering of electrons at charged dislocation lines is proposed. Filled traps along threading dislocation lines act as Coulomb scattering centers. The statistics of trap occupancy at different doping levels are investigated. The theoretical transverse mobility from Coulomb scattering at charged traps is compared to experimental data. Due to the repulsive potential around the charged dislocation lines, electron transport parallel to the dislocations is unaffected by the scattering at charged dislocation lines.
The lateral transport in GaN films produced by electron cyclotron resonance plasma-assisted molecular beam epitaxy doped n type with Si to the levels of 1015–1020 cm−3 was investigated. The room temperature electron mobility versus carrier concentration was found to follow a family of bell-shaped curves consistent with a recently proposed model of scattering by charged dislocations. The mechanism of this scattering was investigated by studying the temperature dependence of the carrier concentration and electron mobility. It was found that in the low carrier concentration region (<1017 cm−3), the electron mobility is thermally activated with an activation energy half of that of carrier concentration. This is in agreement with the prediction of the dislocation model.
We report the growth of InGaN thick films and InGaN/GaN double heterostructures by molecular beam epitaxy at the substrate temperatures 700–800 °C, which is optimal for the growth of GaN. X-ray diffraction and optical absorption studies show phase separation of InN for InxGal−xN thick films with x>0.3. On the other hand, InxGal−xN/GaN double heterostructures show no evidence of phase separation within the detection capabilities of our methods. These observations were accounted for using Stringfellow’s model on phase separation, which gives a critical temperature for miscibility of the GaN–InN system equal to 2457 K.
In this study, we investigated phase separation and long-range atomic ordering phenomena in InGaN alloys produced by molecular beam epitaxy. Films grown at substrate temperatures of 700-750°C with indium concentration higher than 35% showed phase separation, in good agreement with thermodynamic predictions for spinodal decomposition. Films grown at lower substrate temperatures ͑650-675°C͒ revealed compositional inhomogeneity when the indium content was larger than 25%. These films, upon annealing to 725°C, underwent phase separation, similar to those grown at the same temperature. The InGaN films also exhibited long-range atomic ordering. The ordering parameter was found to increase with the growth rate of the films, consistent with the notion that ordering is induced at the growth surface. The ordered phase was found to be stable up to annealing temperatures of 725°C. A competition between ordering and phase separation has been observed, suggesting that the driving force for both phenomena is lattice strain in the alloy.
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