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molecules and I atoms was obtained in rare gas or in rare gas-Br 2 (Cl 2 , I 2 ) mixtures. Study of radiation parameters and lifetime period of the manufactured barrier discharge excilamps has been performed.

The possibility of creation of capacitive discharge excilamps with short pulse duration was studied. There were three types ofpulsed excilamps in experiments: cylindrical glow discharge lamp, capacitive discharge iamp, high pressure volume discharge planar lamp with UV-preiomzation of discharge gap. In capacitive discharge cylindrical KrC1-excilamp, at ?222 nm the radiation pulse power through the end face of a lamp up to 2.5kW has been obtained. Powerful radiation pulses of 50 ns in duration were obtained at pulse repetition rate of 1 kHz. In case ofhigh pressure volume discharge at operating pressure of several atmospheres the radiation peak power density values were as much as 5 kW/cm2 at X25O mn, and 3.5 kW/cm2 at 2v222 nm and at X'3O8 nm. In cylindrical longitudinal excilamp with inner electrodes with Xe-I2 mixture the total pulse power of 75 kW has been obtained. The first experiments with harnessing of inductive energy stores for excilamp excitation have been carried out.