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The semiconductor industry has seen tremendous progress over the last few decades with continuous reduction in transistor size to improve device performance. Miniaturization of devices has led to changes in the dopants and dielectric layers incorporated. As the gradual shift from two-dimensional metal-oxide semiconductor field-effect transistor to three-dimensional (3D) field-effect transistors (finFETs) occurred, it has become imperative to understand compositional variability with nanoscale spatial resolution. Compositional changes can affect device performance primarily through fluctuations in threshold voltage and channel current density. Traditional techniques such as scanning electron microscope and focused ion beam no longer provide the required resolution to probe the physical structure and chemical composition of individual fins. Hence advanced multimodal characterization approaches are required to better understand electronic devices. Herein, we report the study of 14 nm commercial finFETs using atom probe tomography (APT) and scanning transmission electron microscopy-energy-dispersive X-ray spectroscopy (STEM-EDS). Complimentary compositional maps were obtained using both techniques with analysis of the gate dielectrics and silicon fin. APT additionally provided 3D information and allowed analysis of the distribution of low atomic number dopant elements (e.g., boron), which are elusive when using STEM-EDS.

Purpose: To construct a dose monitoring system based on an endorectal balloon coupled to thin scintillating fibers to study the dose to the rectum in proton therapy of prostate cancer. Method: A Geant4 Monte Carlo toolkit was used to simulate the proton therapy of prostate cancer, with an endorectal balloon and a set of scintillating fibers for immobilization and dosimetry measurements, respectively. Results: A linear response of the fibers to the dose delivered was observed to within less than 2%. Results obtained show that fibers close to the prostate recorded higher dose, with the closest fiber recording about one-third of the dose to the target. A 1/r 2 (r is defined as center-to-center distance between the prostate and the fibers) decrease was observed as one goes toward the frontal and distal regions. A very low dose was recorded by the fibers beneath the balloon which is a clear indication that the overall volume of the rectal wall that is exposed to a higher dose is relatively minimized. Further analysis showed a relatively linear relationship between the dose to the target and the dose to the top fibers (total 17), with a slope of (-0.07 ± 0.07) at large number of events per degree of rotation of the modulator wheel (i.e., dose). Conclusion: Thin (1 mm × 1 mm), long (1 m) scintillating fibers were found to be ideal for real time in-vivo dose measurement to the rectum during proton therapy of prostate cancer. The linear response of the fibers to the dose delivered makes them good candidates as dosimeters. With thorough calibration and the ability to define a good correlation between the dose to the target and the dose to the fibers, such dosimeters can be used for real time dose verification to the target.

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