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The purpose of this work has been to demonstrate a simple chemical vapor deposition (CVD) technique that employs easily handled solid metal carbonyls as precursors for the formation of metallic thin films. Co, Fe, Ru, and Os metallic thin films were deposited in a chemical vapor deposition (CVD) apparatus under a vacuum of 10 -5 Torr using Co 2 (CO) 8 , Fe 3 (CO) 12 , Ru 3 (CO) 12 , and Os 3 (CO) 12 at 150, 200, 175, and 225 °C, respectively. FeCo 3 and FeRu 3 metal alloy films were deposited from HFeCo 3 (CO) 12 and H 2 FeRu 3 (CO) 13 at 150 and 200 °C, respectively. A Co/Ru/Co multilayer film was prepared by consecutively depositing each layer from the respective carbonyls at the aforementioned temperatures. The method employed differs from previously reported procedures in that a carrier gas is not used, but a dynamic vacuum of 10 -5 Torr is found sufficient to transport the precursor metal carbonyls to the heated substrate. The precursor carbonyls Co 2 (CO) 8 , Fe 3 (CO) 12 , and H 2 FeRu 3 (CO) 13 , were sufficiently volatile that they could be maintained at room temperature. HFeCo 3 (CO) 12 and Os 3 (CO) 12 were maintained at 50 °C while Ru 3 (CO) 12 was held at 75 °C. The films were characterized by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM), and stylus profilometry.

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h i g h l i g h t sA method of selective patterning of RuO 2 on microelectrodes is described. The microelectrodes consist of titanium nitride with Au and Ni functional areas. Micro-supercapacitors in solid Nafion electrolyte are tested. Electrode capacitance has been measured as high as 203 mF cm À2 . The presence of Tobacco mosaic virus nanotemplate improves rate capability. a b s t r a c tA three-dimensional micro-supercapacitor has been developed using a novel bottom-up assembly method combining genetically modified Tobacco mosaic virus (TMV-1Cys), photolithographically defined micropillars and selective deposition of ruthenium oxide on multi-metallic microelectrodes. The threedimensional microelectrodes consist of a titanium nitride current collector with two functionalized areas: (1) gold coating on the active electrode area promotes TMV-1Cys adhesion, and (2) sacrificial nickel pads dissolve in ruthenium tetroxide plating solution to produce ruthenium oxide on all electrically connected areas. The microfabricated electrodes are arranged in an interdigitated pattern, and the capacitance per electrode has been measured as high as 203 mF cm À2 with solid Nafion electrolyte. The process integration of bio-templated ruthenium oxide with microfabricated electrodes and solid electrolyte is an important advance towards the energy storage needs of mass produced self-sufficient microdevices.

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