The fabrication of air-gap structures for electrical interconnections has been demonstrated using a sacrificial polymer encapsulated in conventional dielectric materials. The air-gap is formed by thermally decomposing the sacrificial polymer and allowing the byproducts to diffuse through the encapsulating dielectric. The diffusivity of the polymer decomposition products is adequate at elevated temperatures to allow the formation of an air-gap. The decomposition of a 5 µm thick polymer film results in less than 100 Å of residue. Electromagnetic simulation shows that the effective dielectric constant of silicon dioxide (ε = 4.2) can be lowered to 2.4-2.8 for relevant structures.
A study of density and glue distributions in polymer foam models for lost foam casting processes is reported. THzpulse measurements were compared with destructive measurements according to the principle of buoyancy-floating method to guarantee high quality standards in lost foam casting processes.
Lithiated nickel oxide (LiNi 0) electrodes have been successfully used with molten K2S207/V205 at 400 t and K2S04/V205 at 480 and 520 CC in tice electrochemical membrane removal of sulfur oxides from simulated flue gases. The porous gas-diffusion electrodes manufactured in the laboratory from commercial Ni electrode material remained stable and conductive in this environment for periods up to 40 days. Polarizations are reported in these systems for current densities up to 50 mA/cm2. The results show exchange current densities from 0.113 mA/cm2 at 400 CC to 0.8 mA/cm2 at 520 CC.
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