No abstract

No abstract

We present the first filly CMOS-integrated 3D Hall probe. The microsystem is developed for precise magnetic field measurements in the range from militeslas up to tens of tesla in the frequency range from DC to 30 kHz and a spatial resolution of about 150 pm. Microsystem is realized in a conventional CMOS process without any additional processing step and can be manufactured at very low cost. With the electronics circuit applying the so-called spinningcurrent technique to the Hall sensor block, we obtain low noise (a resolution better than 100 pT) and low cross talk between the channels (less than 0.2% between the channels up to 2 T). The single chip configuration insures a precision of the orthogonality between the measurement axes better than 0.5". A temperature sensor based on band-gap cell is integrated directly on the chip, which allows a good temperature drift compensation of the system,

No abstract

No abstract