A TeOX-based inorganic photoresist was developed for mastering utilizing heat-mode recording. We discovered that the novel organic thermal isolation film markedly improved the patterning resolution of phase change mastering. We demonstrated Blu-ray Disc read only memory (ROM) mastering with a blue laser diode, using the TeOX-based photoresist and the thermal isolation film. The jitter values of a replicated disc were less than 6% at the full range of the disc. It was also proven that the mastering system is capable of recording 80 nm L/S. In addition, the mechanism of development was clarified.

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To achieve low-cost Blu-ray disc (BD) media, a test line for dual layer media based on the “All Spin Method”, which we have previously proposed, was fabricated. All transparent layers (the space layer, the cover layer, and the hard coat) were made of inexpensive UV resin by spin coating. Dual-layer BD read-only memory (BD-ROM) media were manufactured with a cycle time of 4 s, and the characteristics of the media were observed. The results indicated that (1) the variation in total thickness of the transparent layers was within ±2 µm; (2) tilt properties after sudden environmental change and storage at high temperatures were good; (3) reproduced signals showed good jitter values and symbol error rate (SER); (4) reproduced signals were not degraded even after a storage test of 200 h at 80 °C and 85% relative humidity (RH). We have thus confirmed that the manufacturing line employing the All Spin Method has potential for mass production of low cost BD media. The All Spin Method is adaptable not only to the manufacture of BD-ROM but also BD-R (recordable) and BD-RE (rewritable), so it can contribute to decreasing the costs of all types of BD media.

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