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MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system.

MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.