Performing a good non-uniformity correction is a key part of achieving optimal performance from an infrared scene projector. Ideally, NUC will be performed in the same band in which the scene projector will be used. Cooled, large format MWIR cameras are readily available and have been successfully used to perform NUC, however, cooled large format LWIR cameras are not as common and are prohibitively expensive. Large format uncooled cameras are far more available and affordable, but present a range of challenges in practical use for performing NUC on an IRSP. Santa Barbara Infrared, Inc. reports progress on a continuing development program to use a microbolometer camera to perform LWIR NUC on an IRSP. Camera instability and temporal response and thermal resolution are the main difficulties. A discussion of processes developed to mitigate these issues follows.

No abstract

High pixel temperatures for IR scene projector arrays face materials challenges of oxidation, diffusion, and recrystallization. For cost effective development of new high-temperature materials, we have designed and fabricated simplified pixels for testing. These consist of resistive elements, traces, and bond pads sandwiched between dielectric layers on Si wafers. Processing involves a pad exposure etch, a pixel outline etch, and an undercut etch to thermally isolate the resistive element from the substrate. Test pixels were successfully fabricated by electron-beam lithography using a combination of wet and dry etching.